Effect of vacuum annealing on the microstructure and tribological behavior of hydrogenated amorphous carbon films prepared by magnetron sputtering
文献类型：期刊论文
| 作者 | Wu YX(吴艳霞)1,2 ; Li HX(李红轩)1; Ji L(吉利)1; Liu L(刘流)3; Ye YP(冶银平)1; Chen JM(陈建敏)1; Zhou HD(周惠娣)1; Ye YP(冶银平)
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| 刊名 | Proceedings of the Institution of Mechanical Engineers, Part J: Journal of Engineering Tribology
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| 出版日期 | 2013 |
| 卷号 | 227期号:7页码:729-737 |
| 关键词 | Magnetron sputtering a-C:H film vacuum annealing microstructure tribological behavior |
| ISSN号 | 1350-6501 |
| 通讯作者 | 冶银平 |
| 英文摘要 | Hydrogenated amorphous carbon films (a-C:H) were prepared on silicon and steel substrates by medium frequency unbalanced magnetron sputtering with argon (Ar) and methane (CH4) as the source gases. The effect of annealing temperature in vacuum on the microstructure as well as mechanical properties and tribological behavior of as-prepared a-C:H films were investigated. The friction and wear behaviors of the films in different environments (vacuum, N2, and air) were evaluated with a pin-on-disk tribometer; and their sliding lifetime in vacuum was discussed in relation to friction and wear mechanisms. Results show that annealing in vacuum at a low temperature of up to 200 ℃ causes little change in the microstructure and hardness of a-C:H films but reduces their internal stress and surface roughness to some extent. These annealed films exhibit excellent antiwear ability in all test environments and show promising potential as a kind of space lubricants. The film begins to release hydrogen and increases the content of graphite-like structure at about 300 ℃. As a result, a-C:H films annealed above 200 ℃ have increased surface roughness as well as reduced hardness, internal stress, and wear resistance in all test environments. |
| 学科主题 | 材料科学与物理化学 |
| 收录类别 | SCI |
| 资助信息 | the National Natural Science Foundation of China (regular project grant nos 51175491;50705093;Innovative Group Fund grant no. 50421502) |
| 语种 | 英语 |
| WOS记录号 | WOS:000320159900005 |
| 公开日期 | 2013-12-05 |
| 源URL | [http://210.77.64.217/handle/362003/4464]  |
| 专题 | 兰州化学物理研究所_先进润滑与防护材料研究发展中心 兰州化学物理研究所_固体润滑国家重点实验室 |
| 通讯作者 | Ye YP(冶银平) |
| 作者单位 | 1.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China 2.Chinese Acad Sci, Grad Univ, Beijing, Peoples R China 3.Tianshui Normal Univ, Coll Life Sci & Chem, Tianshui, Peoples R China |
| 推荐引用方式 GB/T 7714 | Wu YX,Li HX,Ji L,et al. Effect of vacuum annealing on the microstructure and tribological behavior of hydrogenated amorphous carbon films prepared by magnetron sputtering[J]. Proceedings of the Institution of Mechanical Engineers, Part J: Journal of Engineering Tribology,2013,227(7):729-737. |
| APA | Wu YX.,Li HX.,Ji L.,Liu L.,Ye YP.,...&冶银平.(2013).Effect of vacuum annealing on the microstructure and tribological behavior of hydrogenated amorphous carbon films prepared by magnetron sputtering.Proceedings of the Institution of Mechanical Engineers, Part J: Journal of Engineering Tribology,227(7),729-737. |
| MLA | Wu YX,et al."Effect of vacuum annealing on the microstructure and tribological behavior of hydrogenated amorphous carbon films prepared by magnetron sputtering".Proceedings of the Institution of Mechanical Engineers, Part J: Journal of Engineering Tribology 227.7(2013):729-737. |
入库方式： OAI收割
来源：兰州化学物理研究所
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