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AFM lithography and fabrication of multifunctional nanostructures with perovskite oxides
文献类型：期刊论文
| 作者 | Li RW |
| 刊名 | Int. J. Nanotechnol.
 |
| 出版日期 | 2009 |
| 卷号 | 6期号:12页码:1067-1085 |
| 关键词 | AFM atomic force microscopy nanolithography nanostructure nanodevice perovskite oxide |
| 合作状况 | 国内 |
| 中文摘要 | Recent progress on atomic force microscopy (AFM) lithography on perovskite oxides, including doped SrTiO3 single crystalline substrates and artificial perovskite manganite films, are reviewed systematically. SrTiO3 is the commercial substrate extensively used for epitaxially growing perovskite oxide films and also a popular film material for fabricating functionalised devices. Perovskite manganite films are very promising candidate materials for spintronic devices and magnetic sensors. By combining AFM lithography and other techniques, such as film deposition, photo lithography, and wet etching etc., multifunctional nanodevices/nanostructures composed of perovskite oxides can be created. |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2010-01-06 |
| 源URL | [http://ir.nimte.ac.cn/handle/174433/225]  |
| 专题 | 宁波材料技术与工程研究所_宁波所知识产出 |
| 推荐引用方式 GB/T 7714 | Li RW. AFM lithography and fabrication of multifunctional nanostructures with perovskite oxides[J]. Int. J. Nanotechnol.,2009,6(12):1067-1085. |
| APA | Li RW.(2009).AFM lithography and fabrication of multifunctional nanostructures with perovskite oxides.Int. J. Nanotechnol.,6(12),1067-1085. |
| MLA | Li RW."AFM lithography and fabrication of multifunctional nanostructures with perovskite oxides".Int. J. Nanotechnol. 6.12(2009):1067-1085. |
入库方式： OAI收割
来源：宁波材料技术与工程研究所
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