Accurate determination of optical constants and thickness of absorbing thin films by a combined ellipsometry and spectrophotometry approach
文献类型：期刊论文
| 作者 | Zhou Y ; Wu GS ; Dai W ; Li HB ; Wang AY |
| 刊名 | ACTA PHYSICA SINICA
 |
| 出版日期 | 2010 |
| 卷号 | 59期号:4页码:2356-2363 |
| 关键词 | ANGLE SPECTROSCOPIC ELLIPSOMETRY MICROSCOPIC SURFACE-ROUGHNESS |
| 合作状况 | 其它 |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2010-06-09 |
| 源URL | [http://ir.nimte.ac.cn/handle/174433/348]  |
| 专题 | 宁波材料技术与工程研究所_宁波所知识产出 |
| 推荐引用方式 GB/T 7714 | Zhou Y,Wu GS,Dai W,et al. Accurate determination of optical constants and thickness of absorbing thin films by a combined ellipsometry and spectrophotometry approach[J]. ACTA PHYSICA SINICA,2010,59(4):2356-2363. |
| APA | Zhou Y,Wu GS,Dai W,Li HB,&Wang AY.(2010).Accurate determination of optical constants and thickness of absorbing thin films by a combined ellipsometry and spectrophotometry approach.ACTA PHYSICA SINICA,59(4),2356-2363. |
| MLA | Zhou Y,et al."Accurate determination of optical constants and thickness of absorbing thin films by a combined ellipsometry and spectrophotometry approach".ACTA PHYSICA SINICA 59.4(2010):2356-2363. |
入库方式： OAI收割
来源：宁波材料技术与工程研究所
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