中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Investigation of the microstructure, mechanical properties and tribological behaviors of Ti-containing diamond-like carbon films fabricated by a hybrid ion beam method

文献类型:期刊论文

作者Wang AY(汪爱英) ; Wei Dai a,b, Peiling Ke a, Myoung-Woon Moon b, Kwang-Ryeol Lee b, Aiying Wang a,⁎
刊名THIN SOLID FILMS
出版日期2012-04-16
卷号33页码:6057—6063
通讯作者汪爱英
合作状况李雨桐
中文摘要"Diamond-like carbon (DLC) films with various titanium contents were investigated using a hybrid ion beam system comprising an anode-layer linear ion beam source and a DC magnetron sputtering unit. The film composition and microstructure were characterized carefully by X-ray photoelectron spectroscopy, transmission electron microscopy and Raman spectroscopy, revealing that the doped Ti atoms had high solubility in the DLC films. The maximum solubility was found to lie between about 7 and 13 at.%. When the Ti content was lower than this solubility, the doped Ti atoms dissolved in the DLC matrix and the films exhibited the typicalfeatures of the amorphous DLC structure and displayed low compressive stresses, friction coefficients and ear rates. However, as the doped content exceeded the solubility, Ti atoms bonded with C atoms, resulting in the formation of carbide nano-particles embedded in the DLC matrix. Although the emergence of the carbide nano-particles promoted graphitizing due to a catalysis effect, the film hardness was enhanced to a great extent. On the other hand, the hard carbides particles caused abrasive wear behavior, inducing a high friction coefficient and wear rate.
学科主题材料科学
原文出处SCI收录
公开日期2013-12-16
源URL[http://ir.nimte.ac.cn/handle/174433/9602]  
专题宁波材料技术与工程研究所_宁波所知识产出
推荐引用方式
GB/T 7714
Wang AY,Wei Dai a,b, Peiling Ke a, Myoung-Woon Moon b, Kwang-Ryeol Lee b, Aiying Wang a,⁎. Investigation of the microstructure, mechanical properties and tribological behaviors of Ti-containing diamond-like carbon films fabricated by a hybrid ion beam method[J]. THIN SOLID FILMS,2012,33:6057—6063.
APA Wang AY,&Wei Dai a,b, Peiling Ke a, Myoung-Woon Moon b, Kwang-Ryeol Lee b, Aiying Wang a,⁎.(2012).Investigation of the microstructure, mechanical properties and tribological behaviors of Ti-containing diamond-like carbon films fabricated by a hybrid ion beam method.THIN SOLID FILMS,33,6057—6063.
MLA Wang AY,et al."Investigation of the microstructure, mechanical properties and tribological behaviors of Ti-containing diamond-like carbon films fabricated by a hybrid ion beam method".THIN SOLID FILMS 33(2012):6057—6063.

入库方式: OAI收割

来源:宁波材料技术与工程研究所

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