Graphite-like carbon films by high power impulse magnetron sputtering
文献类型：期刊论文
| 作者 | Huang MD(黄美东) ; Meidong Huanga,∗, Xueqian Zhanga,b, Peiling Keb,∗∗, Aiying Wangb |
| 刊名 | Applied Surface Science
 |
| 出版日期 | 2013-06-26 |
| 期号 | 6页码:321—326 |
| 通讯作者 | 黄美东 |
| 合作状况 | 李雨桐 |
| 中文摘要 | tHigh-power impulse magnetron sputtering (HiPIMS), coupled with a direct-current magnetron sputter-ing (dcMS) in parallel, was employed to fabricate graphite-like amorphous carbon (GLC) films. Differentimpulse voltages were applied in HiPIMS during the film deposition. The structure and mechanical prop-erties of the GLC films deposited by the HiPIMS were investigated. The bonding structure of the films wasanalyzed by X-ray photoelectron spectroscopy (XPS) and Raman spectroscopy. Atomic force microscopy(AFM) and Nano-indentation were used to characterize the surface quality and micro-hardness, respec-tively. Internal stress of the films was calculated based on the curvature measured by a laser tester.Tribological behavior of the GLC films is studied by a ball-on-disk tribometer in ambient condition. Theeffects of impulse voltage on deposition rate, internal stress, mechanical and tribological properties ofthe GLC films were investigated. The results are analyzed and discussed. |
| 学科主题 | 材料表面与界面 |
| 原文出处 | SCI收录 |
| 公开日期 | 2013-12-16 |
| 源URL | [http://ir.nimte.ac.cn/handle/174433/9947]  |
| 专题 | 宁波材料技术与工程研究所_宁波所知识产出 |
| 推荐引用方式 GB/T 7714 | Huang MD,Meidong Huanga,∗, Xueqian Zhanga,b, Peiling Keb,∗∗, Aiying Wangb. Graphite-like carbon films by high power impulse magnetron sputtering[J]. Applied Surface Science,2013(6):321—326. |
| APA | Huang MD,&Meidong Huanga,∗, Xueqian Zhanga,b, Peiling Keb,∗∗, Aiying Wangb.(2013).Graphite-like carbon films by high power impulse magnetron sputtering.Applied Surface Science(6),321—326. |
| MLA | Huang MD,et al."Graphite-like carbon films by high power impulse magnetron sputtering".Applied Surface Science .6(2013):321—326. |
入库方式： OAI收割
来源：宁波材料技术与工程研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。