Room temperature DC magnetron sputtering deposition of hydrogenated aluminum doped zinc oxide thin films on polyethylene terephthalate substrates
文献类型：期刊论文
| 作者 | Song WJ(宋伟杰) ; KeZhu a, YeYang a, TiefengWei a, RuiqinTan b, PingCui a, WeijieSong a,n, Kwang-LeongChoy c |
| 刊名 | Materials Letters
 |
| 出版日期 | 2013-09-01 |
| 卷号 | 53期号:1页码:363—365 |
| 通讯作者 | 宋伟杰 |
| 合作状况 | 李雨桐 |
| 中文摘要 | In thiswork,aluminumdopedzincoxide(AZO)andhydrogenatedaluminumdopedzincoxide(HAZO) thin films weredepositedonpolyethyleneterephthalate(PET)substratesatroomtemperaturebyDC magnetron sputtering.Hydrogenationimprovedthecrystallinityandreducedsurfaceroughnessofthe AZO thin films. ThehydrogenatedAZO films revealedimprovedelectricalandopticalproperties comparing withtheAZO films preparedunderthesamedepositioncondition:theresistivitydecreased from 0.18 Ω cm to3.0 10？3 Ω cm, whichwasmostlyduetotheincreaseofthecarrierconcentration from 1.5 1019 cm？3 to 2.3 1020 cm？3. Theaveragetransmittanceinthevisiblerangeincreasedfrom 82.0% to84.5%.Thishydrogenatedprocessmayprovideaneasilyrealizedmethodtofabricatehigh qualityAZO films on flexiblesubstratesatroomtemperature. |
| 学科主题 | 物理化学 |
| 原文出处 | SCI收录 |
| 公开日期 | 2013-12-16 |
| 源URL | [http://ir.nimte.ac.cn/handle/174433/10020]  |
| 专题 | 宁波材料技术与工程研究所_宁波所知识产出 |
| 推荐引用方式 GB/T 7714 | Song WJ,KeZhu a, YeYang a, TiefengWei a, RuiqinTan b, PingCui a, WeijieSong a,n, Kwang-LeongChoy c. Room temperature DC magnetron sputtering deposition of hydrogenated aluminum doped zinc oxide thin films on polyethylene terephthalate substrates[J]. Materials Letters,2013,53(1):363—365. |
| APA | Song WJ,&KeZhu a, YeYang a, TiefengWei a, RuiqinTan b, PingCui a, WeijieSong a,n, Kwang-LeongChoy c.(2013).Room temperature DC magnetron sputtering deposition of hydrogenated aluminum doped zinc oxide thin films on polyethylene terephthalate substrates.Materials Letters,53(1),363—365. |
| MLA | Song WJ,et al."Room temperature DC magnetron sputtering deposition of hydrogenated aluminum doped zinc oxide thin films on polyethylene terephthalate substrates".Materials Letters 53.1(2013):363—365. |
入库方式： OAI收割
来源：宁波材料技术与工程研究所
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