Effects of post-rapid thermal annealing on structural, electrical and optical properties of hydrogenated aluminum doped zinc oxide thin films
文献类型：期刊论文
| 作者 | Song WJ(宋伟杰) ; Ke Zhu • Ye Yang • Tiefeng Wei • Ruiqin Tan • Ping Cui • Weijie Song • Kwang-Leong Choy |
| 刊名 | Journal of Materials Science: Materials in Electronics
 |
| 出版日期 | 2013-10-01 |
| 期号 | 10页码:3844—3849 |
| 通讯作者 | 宋伟杰 |
| 合作状况 | 李雨桐 |
| 中文摘要 | In this study, hydrogenated aluminum doped zinc oxide (HAZO) thin films were prepared by DC magnetron sputtering in different H2/(Ar?H2) volume ratio atmosphere. The effects of post-rapid thermal annealing (RTA) in Ar?8 %H2 atmosphere on the structural, optical, and electrical properties of the thin films were investigated systematically. Results showed that the RTA treatment effectively improved the electrical conductivity of the HAZO thin films with small hydrogen content, due to the increase of the Hall mobility and the carrier concentration. The lowest resistivity of the HAZO thin film deposited in 8 % H2 ratio atmosphere reached 6.3 9 10-4 X cm after RTA. The improved electrical properties of the RTA-treated HAZO films were ascribed to the activation of Al dopants, the increase of oxygen vacancies and the desorption of negative charged oxygen species at the grain. These results implied that RTA process might be useful to fabricate high quality HAZO films with a low thermal budget. |
| 学科主题 | 物理化学 |
| 原文出处 | SCI收录 |
| 公开日期 | 2013-12-16 |
| 源URL | [http://ir.nimte.ac.cn/handle/174433/10049]  |
| 专题 | 宁波材料技术与工程研究所_宁波所知识产出 |
| 推荐引用方式 GB/T 7714 | Song WJ,Ke Zhu • Ye Yang • Tiefeng Wei • Ruiqin Tan • Ping Cui • Weijie Song • Kwang-Leong Choy. Effects of post-rapid thermal annealing on structural, electrical and optical properties of hydrogenated aluminum doped zinc oxide thin films[J]. Journal of Materials Science: Materials in Electronics,2013(10):3844—3849. |
| APA | Song WJ,&Ke Zhu • Ye Yang • Tiefeng Wei • Ruiqin Tan • Ping Cui • Weijie Song • Kwang-Leong Choy.(2013).Effects of post-rapid thermal annealing on structural, electrical and optical properties of hydrogenated aluminum doped zinc oxide thin films.Journal of Materials Science: Materials in Electronics(10),3844—3849. |
| MLA | Song WJ,et al."Effects of post-rapid thermal annealing on structural, electrical and optical properties of hydrogenated aluminum doped zinc oxide thin films".Journal of Materials Science: Materials in Electronics .10(2013):3844—3849. |
入库方式： OAI收割
来源：宁波材料技术与工程研究所
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