中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Thermal crystallization kinetic and electrical properties of partly crystallized amorphous indium oxide thin films sputtering deposited in the presence or the absence of water vapor

文献类型:期刊论文

作者M. H. Wang ; H. Lei ; Y. Seki ; S. Seki ; Y. Sawada ; Y. Hoshi ; S. H. Wang ; L. X. Sun
刊名Journal of Thermal Analysis and Calorimetry
出版日期2013
卷号111期号:2页码:1457-1461
关键词Partly crystallized amorphous IO film Water vapor Thermal crystallization kinetic Electrical properties tin-oxide microstructures
ISSN号1388-6150
原文出处://WOS:000313409700058
语种英语
公开日期2013-12-24
源URL[http://ir.imr.ac.cn/handle/321006/71545]  
专题金属研究所_中国科学院金属研究所
推荐引用方式
GB/T 7714
M. H. Wang,H. Lei,Y. Seki,et al. Thermal crystallization kinetic and electrical properties of partly crystallized amorphous indium oxide thin films sputtering deposited in the presence or the absence of water vapor[J]. Journal of Thermal Analysis and Calorimetry,2013,111(2):1457-1461.
APA M. H. Wang.,H. Lei.,Y. Seki.,S. Seki.,Y. Sawada.,...&L. X. Sun.(2013).Thermal crystallization kinetic and electrical properties of partly crystallized amorphous indium oxide thin films sputtering deposited in the presence or the absence of water vapor.Journal of Thermal Analysis and Calorimetry,111(2),1457-1461.
MLA M. H. Wang,et al."Thermal crystallization kinetic and electrical properties of partly crystallized amorphous indium oxide thin films sputtering deposited in the presence or the absence of water vapor".Journal of Thermal Analysis and Calorimetry 111.2(2013):1457-1461.

入库方式: OAI收割

来源:金属研究所

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