中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Effects of annealing temperature on the characteristics of Ga-doped ZnO film metal-semiconductor-metal ultraviolet photodetectors

文献类型:期刊论文

作者Zhang, BS(张宝顺); Xing, Z(邢政); Fan, YM(樊英民); Fu, K(付凯); Wang, RX(王荣新)
刊名JOURNAL OF APPLIED PHYSICS
出版日期2013-02-28
卷号113期号:8
通讯作者Wang, RX(王荣新)
英文摘要Metal-semiconductor-metal ultraviolet photodetectors were fabricated by using the sputtered Ga-doped ZnO (GZO) thin films on sapphire substrate as an active layer. Current-voltage (I-V) and opto-electrical characteristics of the devices were investigated. It is found that the peak optical responsivity of the devices can be significantly improved by selecting appropriate thermal annealing temperature, i.e., from 12.0 A/W (annealed at 500 °C) and 54.0 A/W (700 °C). Furthermore, dark current of the devices drops by two orders of magnitude after annealing process. The significant improvement in performance of the device is ascribed to the removal of massive defect centers of the GZO thin films and increase of Schottky barrier height between the GZO and metal electrodes after thermal annealing at appropriate temperatures.
收录类别SCI ; EI
语种英语
WOS记录号WOS:000315667500077
公开日期2014-01-13
源URL[http://ir.sinano.ac.cn/handle/332007/1328]  
专题苏州纳米技术与纳米仿生研究所_纳米加工公共平台
通讯作者Wang, RX(王荣新)
推荐引用方式
GB/T 7714
Zhang, BS,Xing, Z,Fan, YM,et al. Effects of annealing temperature on the characteristics of Ga-doped ZnO film metal-semiconductor-metal ultraviolet photodetectors[J]. JOURNAL OF APPLIED PHYSICS,2013,113(8).
APA Zhang, BS,Xing, Z,Fan, YM,Fu, K,&Wang, RX.(2013).Effects of annealing temperature on the characteristics of Ga-doped ZnO film metal-semiconductor-metal ultraviolet photodetectors.JOURNAL OF APPLIED PHYSICS,113(8).
MLA Zhang, BS,et al."Effects of annealing temperature on the characteristics of Ga-doped ZnO film metal-semiconductor-metal ultraviolet photodetectors".JOURNAL OF APPLIED PHYSICS 113.8(2013).

入库方式: OAI收割

来源:苏州纳米技术与纳米仿生研究所

浏览0
下载0
收藏0
其他版本

除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。