A comparative study of YBa2Cu3O7-delta/YSZ bilayer films deposited on silicon-on-insulator substrates with and without HF pretreatment
文献类型：期刊论文
| 作者 | Wang, P ; Li, J ; Chen, YF ; Li, S ; Wang, J ; Xie, TY ; Zheng, DN |
| 刊名 | CHINESE PHYSICS B
 |
| 出版日期 | 2009 |
| 卷号 | 18期号:4页码:1679 |
| 关键词 | PULSED-LASER DEPOSITION THIN-FILMS BUFFER LAYERS EPITAXIAL-GROWTH TEMPERATURE SURFACE SI |
| ISSN号 | 1674-1056 |
| 通讯作者 | Zheng, DN: Chinese Acad Sci, Inst Phys, Natl Lab Superconduct, Beijing 100190, Peoples R China. |
| 中文摘要 | Highly epitaxial YBa2Cu3O7-delta (YBCO) and yttria-stabilized zirconia (YSZ) bilayer thin films have been deposited on silicon-on-insulator (SOI) substrates by using in situ pulsed laser deposition (PLD) technique. In the experiment, the native amorphous SiO2 layers on some of the SOI substrates are removed by dipping them in a 10% HF solution for 15s. Comparing several qualities of films grown on substrates with or without HF pretreatment, such as thin film crystallinity, general surface roughness, temperature dependence of resistance, surface morphology, as well as average crack spacing and crack width, naturally leads to the conclusion that preserving the native SiO2 layer on the surface of the SOI substrate can not only simplify the experimental process but can also achieve fairly high quality YSZ and YBCO thin films. |
| 收录类别 | SCI |
| 资助信息 | National Natural Science Foundation of China [50672125, 10574154]; Natural Science Foundation of Shanxi Province, China [2009011003-1]; Youth Foundation of Shanxi Datong University, China [2007Q10] |
| 语种 | 英语 |
| 公开日期 | 2013-09-17 |
| 源URL | [http://ir.iphy.ac.cn/handle/311004/32859]  |
| 专题 | 物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文 |
| 推荐引用方式 GB/T 7714 | Wang, P,Li, J,Chen, YF,et al. A comparative study of YBa2Cu3O7-delta/YSZ bilayer films deposited on silicon-on-insulator substrates with and without HF pretreatment[J]. CHINESE PHYSICS B,2009,18(4):1679. |
| APA | Wang, P.,Li, J.,Chen, YF.,Li, S.,Wang, J.,...&Zheng, DN.(2009).A comparative study of YBa2Cu3O7-delta/YSZ bilayer films deposited on silicon-on-insulator substrates with and without HF pretreatment.CHINESE PHYSICS B,18(4),1679. |
| MLA | Wang, P,et al."A comparative study of YBa2Cu3O7-delta/YSZ bilayer films deposited on silicon-on-insulator substrates with and without HF pretreatment".CHINESE PHYSICS B 18.4(2009):1679. |
入库方式： OAI收割
来源：物理研究所
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