A comparative study on microstructures of beta-FeSi2 and carbon-doped beta-Fe(Si,C)(2) films by transmission electron microscopy
文献类型：期刊论文
| 作者 | Li, XN ; Nie, D ; Dong, C |
| 刊名 | NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
 |
| 出版日期 | 2002 |
| 卷号 | 194期号:1页码:47 |
| 关键词 | ION-BEAM SYNTHESIS SEMICONDUCTING FESI2 THIN-FILMS DISILICIDE DEPOSITION |
| ISSN号 | 0168-583X |
| 通讯作者 | Dong, C: Dalian Univ Technol, Dept Mat Engn, State Key Lab Mat Modificat Laser Ion & Electron, Dalian 116024, Peoples R China. |
| 中文摘要 | The microstructures of beta-FeSi2 and carbon-doped beta-Fe(C,Si)(2) films, synthesized on Si substrates by metal vapor vacuum arc ion source ion implantor, are studied by transmission electron microscopy. Structure evolution at different annealing temperatures shows that, in comparison with undoped films, the C-doped film quality is improved as manifested by smooth beta/Si interface, homogeneous film thickness, fine grains, and high thermal stability. When the energy and dosage are 60 KV and 4 x 10(17) ions/cm(2), amorphous layer is formed directly, which transforms into homogeneous and smooth beta-FeSi2 surface films after crystallization. (C) 2002 Elsevier Science B.V. All rights reserved. |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2013-09-17 |
| 源URL | [http://ir.iphy.ac.cn/handle/311004/32861]  |
| 专题 | 物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文 |
| 推荐引用方式 GB/T 7714 | Li, XN,Nie, D,Dong, C. A comparative study on microstructures of beta-FeSi2 and carbon-doped beta-Fe(Si,C)(2) films by transmission electron microscopy[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,2002,194(1):47. |
| APA | Li, XN,Nie, D,&Dong, C.(2002).A comparative study on microstructures of beta-FeSi2 and carbon-doped beta-Fe(Si,C)(2) films by transmission electron microscopy.NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,194(1),47. |
| MLA | Li, XN,et al."A comparative study on microstructures of beta-FeSi2 and carbon-doped beta-Fe(Si,C)(2) films by transmission electron microscopy".NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 194.1(2002):47. |
入库方式： OAI收割
来源：物理研究所
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