A novel reactive gas source and its application to carbon nanotube film deposition
文献类型：期刊论文
| 作者 | Jiang, N ; Chen, HY ; Qian, SF |
| 刊名 | CHINESE PHYSICS LETTERS
 |
| 出版日期 | 2005 |
| 卷号 | 22期号:1页码:161 |
| 关键词 | PRESSURE GLOW-DISCHARGE ATMOSPHERIC-PRESSURE DIELECTRIC BARRIER PLASMA GROWTH VAPOR |
| ISSN号 | 0256-307X |
| 通讯作者 | Jiang, N: Chinese Acad Sci, Inst Phys, POB 603, Beijing 100080, Peoples R China. |
| 中文摘要 | Generally, gaseous discharge at pressure higher than 10 kPa will collapse to filamentary form or streamer, which will produce a non-uniform treatment on the sample surface. Thus, atmospheric pressure glow discharge (APGD) is developed. However the realization of the APGD is not obvious, it needs special conditions. We propose a new concept to solve the non-uniformity problem. By using a grid electrode and putting the sample downstream of the discharge plasma, the streamers, instead of striking on sample surface, will strike on the grid, and the neutral active species produced in the discharge diffuse out to reach the sample surface uniformly. Finally, a carbon nanotube (CNT) film was produced to test this new concept. |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2013-09-17 |
| 源URL | [http://ir.iphy.ac.cn/handle/311004/33146]  |
| 专题 | 物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文 |
| 推荐引用方式 GB/T 7714 | Jiang, N,Chen, HY,Qian, SF. A novel reactive gas source and its application to carbon nanotube film deposition[J]. CHINESE PHYSICS LETTERS,2005,22(1):161. |
| APA | Jiang, N,Chen, HY,&Qian, SF.(2005).A novel reactive gas source and its application to carbon nanotube film deposition.CHINESE PHYSICS LETTERS,22(1),161. |
| MLA | Jiang, N,et al."A novel reactive gas source and its application to carbon nanotube film deposition".CHINESE PHYSICS LETTERS 22.1(2005):161. |
入库方式： OAI收割
来源：物理研究所
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