Ablation of fused quartz by ultraviolet, visible or infrared laser coupled with VUV laser
文献类型：期刊论文
| 作者 | Zhang, J ; Sugioka, K ; Wada, S ; Tashiro, H ; Toyoda, K |
| 刊名 | JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS
 |
| 出版日期 | 1996 |
| 卷号 | 35期号:11A页码:L1422 |
| ISSN号 | 0021-4922 |
| 通讯作者 | Zhang, J: RIKEN,INST PHYS & CHEM RES,WAKO,SAITAMA 35101,JAPAN. |
| 中文摘要 | Ablation of fused quartz by a 266, 532 or 1064 nm wavelength laser coupled with VUV laser (133-184 nm) was reported, With the VUV-266 nm laser system, high-quality ablation of fused quartz with a well-defined patterned structure and a surface roughness value as small as 46.2 nm at the circumference of she patterned structure was carried out. The ablation quality was poorer and the surface roughness value was higher, at 97.8 nm; when the VUV-532 nm laser system was used, but the ablation quality was still better than in the case of 266 or 532 nm single wavelength ablation. In contrast. clean ablation of fused quartz could not be achieved using the VUV-1064 nm laser system. The ablated region appeared to be an undefined crater-like structure, and the surface roughness value reached 121.0 nm, which were almost the same characteristics as in the case of 1064, nm single wavelength ablation. On the basis of the baud structure of the fused quartz and the excited-state absorption determined through coupling of the VUV laser and the ablation laser (266, 532 or 1064 nm); the ablation mechanism was discussed. |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2013-09-17 |
| 源URL | [http://ir.iphy.ac.cn/handle/311004/33403]  |
| 专题 | 物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文 |
| 推荐引用方式 GB/T 7714 | Zhang, J,Sugioka, K,Wada, S,et al. Ablation of fused quartz by ultraviolet, visible or infrared laser coupled with VUV laser[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS,1996,35(11A):L1422. |
| APA | Zhang, J,Sugioka, K,Wada, S,Tashiro, H,&Toyoda, K.(1996).Ablation of fused quartz by ultraviolet, visible or infrared laser coupled with VUV laser.JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS,35(11A),L1422. |
| MLA | Zhang, J,et al."Ablation of fused quartz by ultraviolet, visible or infrared laser coupled with VUV laser".JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS 35.11A(1996):L1422. |
入库方式： OAI收割
来源：物理研究所
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