中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Bilayer-by-bilayer etching of 6H-GaN(0001) with Cl

文献类型:期刊论文

作者Kuwano, S ; Xue, QZ ; Asano, Y ; Fujikawa, Y ; Xue, QK ; Nakayama, KS ; Nagao, T ; Sakurai, T
刊名SURFACE SCIENCE
出版日期2004
卷号561期号:2-3页码:L213
关键词SCANNING-TUNNELING-MICROSCOPY MOLECULAR-BEAM EPITAXY SURFACE GAN RECONSTRUCTIONS GAN(0001) GROWTH
ISSN号0039-6028
通讯作者Sakurai, T: Tohoku Univ, IMR, 2-1-1 Katahira, Sendai, Miyagi 9808577, Japan.
中文摘要Etching of Ga-polar GaN(0 0 0 1) surface with Cl has been studied using scanning tunneling microscopy. Three different processes in the thermally activated Cl reaction, i.e., the removal of Ga-fluid, the formation of alternative zigzag and smooth steps, and the initiation of triangle pits on the terrace that take place at different temperatures, are identified. The atom removal is found to proceed via a bilayer-by-bilayer mode on the GaN surface, and the underlying mechanism is discussed in terms of the surface atomic structure. (C) 2004 Elsevier B.V. All rights reserved.
收录类别SCI
语种英语
公开日期2013-09-17
源URL[http://ir.iphy.ac.cn/handle/311004/34233]  
专题物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文
推荐引用方式
GB/T 7714
Kuwano, S,Xue, QZ,Asano, Y,et al. Bilayer-by-bilayer etching of 6H-GaN(0001) with Cl[J]. SURFACE SCIENCE,2004,561(2-3):L213.
APA Kuwano, S.,Xue, QZ.,Asano, Y.,Fujikawa, Y.,Xue, QK.,...&Sakurai, T.(2004).Bilayer-by-bilayer etching of 6H-GaN(0001) with Cl.SURFACE SCIENCE,561(2-3),L213.
MLA Kuwano, S,et al."Bilayer-by-bilayer etching of 6H-GaN(0001) with Cl".SURFACE SCIENCE 561.2-3(2004):L213.

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来源:物理研究所

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