中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Controllable three dimensional deformation of platinum nanopillars by focused-ion-beam irradiation

文献类型:期刊论文

作者Cui, AJ ; Li, WX ; Luo, Q ; Liu, Z ; Gu, CZ
刊名MICROELECTRONIC ENGINEERING
出版日期2012
卷号98页码:409
关键词CHEMICAL-VAPOR-DEPOSITION FREE-SPACE FABRICATION NANOWIRES MOLD
ISSN号0167-9317
通讯作者Li, WX: Chinese Acad Sci, Beijing Natl Lab Condensed Matter Phys, Inst Phys, Beijing 100190, Peoples R China.
中文摘要Freestanding nanostructures are fundamental elements to construct three-dimensional (3D) nanodevices. The bending of nanopillars by ion irradiation can be used to produce overhanging nanostructures. In this paper, we report the bending of focused-ion-beam (FIB) grown platinum nanopillars by FIB irradiation. The results show that for nanopillars originally perpendicular to the substrate, by adjusting the relative geometry of the incident ion beam and the nanopillars, desired bending direction and shape can be achieved. Such nanostructures can be used for 3D nanodevice constructions. Besides, ion irradiation with optimized conditions can be used to improve the surface morphology of the as-deposited nanopillars. Our results suggest that the method of bending freestanding nanoobjects using FIB is likely to be advantageous to construct interconnects in 3D nanostructures towards the properties investigations of selected individual nanoobjects. (C) 2012 Elsevier B.V. All rights reserved.
收录类别SCI
资助信息National Natural Science Foundation of China [91123004, 11104334, 50825206, 10834012, 60801043]; National Basic Research Program (973) of China [2009CB930502]; Chinese Service Center for Scholar Exchange; Outstanding Technical Talent Program of the Chinese Academy of Sciences
语种英语
公开日期2013-09-17
源URL[http://ir.iphy.ac.cn/handle/311004/35123]  
专题物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文
推荐引用方式
GB/T 7714
Cui, AJ,Li, WX,Luo, Q,et al. Controllable three dimensional deformation of platinum nanopillars by focused-ion-beam irradiation[J]. MICROELECTRONIC ENGINEERING,2012,98:409.
APA Cui, AJ,Li, WX,Luo, Q,Liu, Z,&Gu, CZ.(2012).Controllable three dimensional deformation of platinum nanopillars by focused-ion-beam irradiation.MICROELECTRONIC ENGINEERING,98,409.
MLA Cui, AJ,et al."Controllable three dimensional deformation of platinum nanopillars by focused-ion-beam irradiation".MICROELECTRONIC ENGINEERING 98(2012):409.

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来源:物理研究所

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