CVD diamond films: nucleation and growth
文献类型：期刊论文
| 作者 | Lee, ST ; Lin, ZD ; Jiang, X |
| 刊名 | MATERIALS SCIENCE & ENGINEERING R-REPORTS
 |
| 出版日期 | 1999 |
| 卷号 | 25期号:4页码:123 |
| 关键词 | CHEMICAL-VAPOR-DEPOSITION BIAS-ENHANCED NUCLEATION TRANSMISSION ELECTRON-MICROSCOPY MICROWAVE PLASMA THIN-FILMS ORIENTED DIAMOND EPITAXIAL-GROWTH HETEROEPITAXIAL NUCLEATION ION-IMPLANTATION 001 SILICON |
| ISSN号 | 0927-796X |
| 通讯作者 | Lee, ST: City Univ Hong Kong, Ctr Superdiamond & Adv Films, Hong Kong, Peoples R China. |
| 中文摘要 | In the last decade, we have seen rapid developments in metastable diamond synthesis by means of low-pressure chemical vapor deposition. Concurrently, a fast growing interest in diamond technology has emerged. This review discusses the various low-pressure growth methods of diamond films. Particular attention is paid to recent advances in the understanding of the mechanism of diamond nucleation and metastable growth. These advances are discussed in connection with the advances in diamond heteroepitaxy, which raises hopes that single crystalline diamond films are not far beyond reach. Modern surface science techniques applied to diamond study have played an essential role in these achievements and their contributions are discussed. (C) 1999 Elsevier Science S.A. All rights reserved. |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2013-09-17 |
| 源URL | [http://ir.iphy.ac.cn/handle/311004/35603]  |
| 专题 | 物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文 |
| 推荐引用方式 GB/T 7714 | Lee, ST,Lin, ZD,Jiang, X. CVD diamond films: nucleation and growth[J]. MATERIALS SCIENCE & ENGINEERING R-REPORTS,1999,25(4):123. |
| APA | Lee, ST,Lin, ZD,&Jiang, X.(1999).CVD diamond films: nucleation and growth.MATERIALS SCIENCE & ENGINEERING R-REPORTS,25(4),123. |
| MLA | Lee, ST,et al."CVD diamond films: nucleation and growth".MATERIALS SCIENCE & ENGINEERING R-REPORTS 25.4(1999):123. |
入库方式： OAI收割
来源：物理研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。