中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Development of the technique for fabricating submicron moire gratings on metal materials using focused ion beam milling

文献类型:期刊论文

作者Hua, H ; Hui-Min, X ; Zhi-Qiang, G ; Qiang, L ; Chang-Zhi, G ; Hai-Chang, Q ; Li-Jian, R
刊名CHINESE PHYSICS LETTERS
出版日期2007
卷号24期号:9页码:2521
ISSN号0256-307X
中文摘要A focused gallium ion (Ga+) beam is used to fabricate micro/submicron spacing gratings on the surface of porous NiTi shape memory alloy (SMA). The crossing type of gratings with double-frequency (2500 l/mm and 5000 l/mm) using the focused ion beam (FIB) milling are successfully produced in a combination mode or superposition mode. Based on the double-frequency gratings, high-quality scanning electron microscopy (SEM) Moire patterns are obtained to study the micro-scale deformation of porous NiTi SMA. The grating fabrication technique is discussed in detail. The experimental results verify the feasibility of fabricating high frequency grating on metal surface using FIB milling.
收录类别SCI
公开日期2013-09-17
源URL[http://ir.iphy.ac.cn/handle/311004/35890]  
专题物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文
推荐引用方式
GB/T 7714
Hua, H,Hui-Min, X,Zhi-Qiang, G,et al. Development of the technique for fabricating submicron moire gratings on metal materials using focused ion beam milling[J]. CHINESE PHYSICS LETTERS,2007,24(9):2521.
APA Hua, H.,Hui-Min, X.,Zhi-Qiang, G.,Qiang, L.,Chang-Zhi, G.,...&Li-Jian, R.(2007).Development of the technique for fabricating submicron moire gratings on metal materials using focused ion beam milling.CHINESE PHYSICS LETTERS,24(9),2521.
MLA Hua, H,et al."Development of the technique for fabricating submicron moire gratings on metal materials using focused ion beam milling".CHINESE PHYSICS LETTERS 24.9(2007):2521.

入库方式: OAI收割

来源:物理研究所

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