Diamond cone arrays with controlled morphologies formed by self-organized selective ions sputtering
文献类型：期刊论文
| 作者 | Wang, Q ; Gu, CZ ; Xu, Z ; Li, JJ ; Wang, ZL ; Bai, XD ; Cui, Z |
| 刊名 | JOURNAL OF APPLIED PHYSICS
 |
| 出版日期 | 2006 |
| 卷号 | 100期号:3 |
| ISSN号 | 0021-8979 |
| 关键词 | FIELD-EMISSION SWARM COEFFICIENTS CROSS-SECTIONS FABRICATION SILICON PLASMA CARBON FILMS ENERGIES COLLISIONS |
| 通讯作者 | Gu, CZ: Chinese Acad Sci, Inst Phys, Beijing Natl Lab Condensed Matter Phys, Beijing 100080, Peoples R China. |
| 中文摘要 | Controlled preparation of nanoscale materials and the underlying mechanisms are essential issues nowadays. Here, we report a significant subtractive formation process of large-area diamond conical nanostructure arrays using a hot filament chemical vapor deposition (HFCVD) system with negative biasing of the substrates, and the etching effect of energetic ions on the formation of diamond cone arrays with controlled morphology has been studied in detail. It shows that methylic ions dominantly contribute to diamond cone formation based on a neutral-ion charge exchange collision model. The self-organized selective sputtering process of as-formed hillock bottoms on a roughened surface by low energetic ions plays a key role for the formation and development of diamond cones. The cone morphologies under various experimental parameters are systematically studied, and they nicely confirm and supplement the as-established cone formation mechanism. c 2006 American Institute of Physics. |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2013-09-17 |
| 源URL | [http://ir.iphy.ac.cn/handle/311004/35907]  |
| 专题 | 物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文 |
| 推荐引用方式 GB/T 7714 | Wang, Q,Gu, CZ,Xu, Z,et al. Diamond cone arrays with controlled morphologies formed by self-organized selective ions sputtering[J]. JOURNAL OF APPLIED PHYSICS,2006,100(3). |
| APA | Wang, Q.,Gu, CZ.,Xu, Z.,Li, JJ.,Wang, ZL.,...&Cui, Z.(2006).Diamond cone arrays with controlled morphologies formed by self-organized selective ions sputtering.JOURNAL OF APPLIED PHYSICS,100(3). |
| MLA | Wang, Q,et al."Diamond cone arrays with controlled morphologies formed by self-organized selective ions sputtering".JOURNAL OF APPLIED PHYSICS 100.3(2006). |
入库方式： OAI收割
来源：物理研究所
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