Effect of composition on damage accumulation in ternary ZnO-based oxides implanted with heavy ions
文献类型：期刊论文
| 作者 | Azarov, AY ; Svensson, BG ; Hallen, A ; Du, XL ; Kuznetsov, AY |
| 刊名 | JOURNAL OF APPLIED PHYSICS
 |
| 出版日期 | 2010 |
| 卷号 | 108期号:3 |
| 关键词 | BOMBARDMENT SOLIDS MGO |
| ISSN号 | 0021-8979 |
| 通讯作者 | Azarov, AY: Univ Oslo, Dept Phys, POB 1048 Blindern, NO-0316 Oslo, Norway. |
| 中文摘要 | Thin films of wurtzite Mg(x)Zn(1-x)O (x <= 0.3) grown by molecular beam epitaxy and wurtzite Cd(x)Zn(1-x)O (x <= 0.05) grown by metal organic chemical vapor deposition were implanted at room temperature with 150 keV Er(+) ions and 200 keV Au(+) ions in a wide dose range. Damage accumulation was studied by Rutherford backscattering/channeling spectrometry. Results show that the film composition affects the damage accumulation behavior in both MgZnO and CdZnO dramatically. In particular, increasing the Mg content in MgZnO results in enhanced damage accumulation in the region between the bulk and surface damage peaks characteristically distinguished in the pure ZnO. However, the overall damage accumulation in MgZnO layers, as well as in pure ZnO, exhibits saturation with increasing ion dose and MgZnO cannot be amorphized even at the highest ion dose used (3 X 10(16) Er/cm(2)). Increasing the Cd content in CdZnO affects the saturation stage of the damage accumulation and leads to an enhancement of damage production in both Cd and Zn sublattices. (C) 2010 American Institute of Physics. [doi:10.1063/1.3467532] |
| 收录类别 | SCI |
| 资助信息 | Norwegian Research Council; NordForsk; Chinese Academy of Science |
| 语种 | 英语 |
| 公开日期 | 2013-09-17 |
| 源URL | [http://ir.iphy.ac.cn/handle/311004/36386]  |
| 专题 | 物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文 |
| 推荐引用方式 GB/T 7714 | Azarov, AY,Svensson, BG,Hallen, A,et al. Effect of composition on damage accumulation in ternary ZnO-based oxides implanted with heavy ions[J]. JOURNAL OF APPLIED PHYSICS,2010,108(3). |
| APA | Azarov, AY,Svensson, BG,Hallen, A,Du, XL,&Kuznetsov, AY.(2010).Effect of composition on damage accumulation in ternary ZnO-based oxides implanted with heavy ions.JOURNAL OF APPLIED PHYSICS,108(3). |
| MLA | Azarov, AY,et al."Effect of composition on damage accumulation in ternary ZnO-based oxides implanted with heavy ions".JOURNAL OF APPLIED PHYSICS 108.3(2010). |
入库方式： OAI收割
来源：物理研究所
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