EFFECT OF GRADED LAYER ON THE X-RAY DOUBLE-CRYSTAL DIFFRACTION ROCKING CURVE
文献类型:期刊论文
作者 | OUYANG, JT ; MAI, ZH ; CUI, SF ; LI, JH ; LI, CR |
刊名 | JOURNAL OF MATERIALS SCIENCE
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出版日期 | 1992 |
卷号 | 27期号:24页码:6765 |
关键词 | DEVICE STRUCTURES DIFFRACTOMETRY |
ISSN号 | 0022-2461 |
通讯作者 | OUYANG, JT: CHINESE ACAD SCI,INST PHYS,POB 603,BEIJING 100080,PEOPLES R CHINA. |
中文摘要 | The composition gradient in an InAlAs epitaxial layer on InP (001) substrate has been investigated using an X-ray double-crystal diffraction technique and a computer simulation method. Good agreement has been obtained between theoretical and experimental rocking curves when the correct graded layers are assumed in the samples. The results show that the graded layer introduces very sensitive asymmetric changes in layer peak and interference fringes. The intensities of the interference increase more strongly on the higher or lower angle side, while they are reduced on the other side, and the layer peak shifts to the higher or lower angle direction according to the positive or negative gradient. In all cases, however, the angle separations of the interference fringes do not change if the total thickness of the epilayer is unchanged. |
收录类别 | SCI |
语种 | 英语 |
公开日期 | 2013-09-17 |
源URL | [http://ir.iphy.ac.cn/handle/311004/36438] ![]() |
专题 | 物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文 |
推荐引用方式 GB/T 7714 | OUYANG, JT,MAI, ZH,CUI, SF,et al. EFFECT OF GRADED LAYER ON THE X-RAY DOUBLE-CRYSTAL DIFFRACTION ROCKING CURVE[J]. JOURNAL OF MATERIALS SCIENCE,1992,27(24):6765. |
APA | OUYANG, JT,MAI, ZH,CUI, SF,LI, JH,&LI, CR.(1992).EFFECT OF GRADED LAYER ON THE X-RAY DOUBLE-CRYSTAL DIFFRACTION ROCKING CURVE.JOURNAL OF MATERIALS SCIENCE,27(24),6765. |
MLA | OUYANG, JT,et al."EFFECT OF GRADED LAYER ON THE X-RAY DOUBLE-CRYSTAL DIFFRACTION ROCKING CURVE".JOURNAL OF MATERIALS SCIENCE 27.24(1992):6765. |
入库方式: OAI收割
来源:物理研究所
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