中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
EFFECT OF GRADED LAYER ON THE X-RAY DOUBLE-CRYSTAL DIFFRACTION ROCKING CURVE

文献类型:期刊论文

作者OUYANG, JT ; MAI, ZH ; CUI, SF ; LI, JH ; LI, CR
刊名JOURNAL OF MATERIALS SCIENCE
出版日期1992
卷号27期号:24页码:6765
关键词DEVICE STRUCTURES DIFFRACTOMETRY
ISSN号0022-2461
通讯作者OUYANG, JT: CHINESE ACAD SCI,INST PHYS,POB 603,BEIJING 100080,PEOPLES R CHINA.
中文摘要The composition gradient in an InAlAs epitaxial layer on InP (001) substrate has been investigated using an X-ray double-crystal diffraction technique and a computer simulation method. Good agreement has been obtained between theoretical and experimental rocking curves when the correct graded layers are assumed in the samples. The results show that the graded layer introduces very sensitive asymmetric changes in layer peak and interference fringes. The intensities of the interference increase more strongly on the higher or lower angle side, while they are reduced on the other side, and the layer peak shifts to the higher or lower angle direction according to the positive or negative gradient. In all cases, however, the angle separations of the interference fringes do not change if the total thickness of the epilayer is unchanged.
收录类别SCI
语种英语
公开日期2013-09-17
源URL[http://ir.iphy.ac.cn/handle/311004/36438]  
专题物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文
推荐引用方式
GB/T 7714
OUYANG, JT,MAI, ZH,CUI, SF,et al. EFFECT OF GRADED LAYER ON THE X-RAY DOUBLE-CRYSTAL DIFFRACTION ROCKING CURVE[J]. JOURNAL OF MATERIALS SCIENCE,1992,27(24):6765.
APA OUYANG, JT,MAI, ZH,CUI, SF,LI, JH,&LI, CR.(1992).EFFECT OF GRADED LAYER ON THE X-RAY DOUBLE-CRYSTAL DIFFRACTION ROCKING CURVE.JOURNAL OF MATERIALS SCIENCE,27(24),6765.
MLA OUYANG, JT,et al."EFFECT OF GRADED LAYER ON THE X-RAY DOUBLE-CRYSTAL DIFFRACTION ROCKING CURVE".JOURNAL OF MATERIALS SCIENCE 27.24(1992):6765.

入库方式: OAI收割

来源:物理研究所

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