Electromechanical Behavior of Interdigitated SiO2 Cantilever Arrays
文献类型：期刊论文
| 作者 | Guan, ZQ ; Luo, G ; Montelius, L ; Xu, HX |
| 刊名 | CHINESE PHYSICS LETTERS
 |
| 出版日期 | 2010 |
| 卷号 | 27期号:2 |
| 关键词 | PULL-IN INSTABILITY RESONANT CANTILEVER SENSORS MICROCANTILEVER GAUGES |
| ISSN号 | 0256-307X |
| 通讯作者 | Guan, ZQ: Chinese Acad Sci, Inst Phys, Nanoscale Phys & Devices Lab, Beijing 100190, Peoples R China. |
| 中文摘要 | Bending and first flexural mode vibration behavior of electrostatic actuated nanometer-sized interdigitated cantilever arrays are characterized under vacuum conditions. The "pull-in" effect in dc driving and the "hard spring effect" in ac driving are observed. A mass sensitivity of 20 fg is expected for our devices due to the ultra-small mass of the arm and relative high.. factor. The mass-spring lump model combined with Green's function method is used to fit the dc driving behaviors including the pull-in voltage. For the ac driving case, the polynomial expansion of the capacitive force is used in the model. The successfully fittings of the pull-in voltage and the hard spring effect prove that our simulation method could be used for guiding the geometrical design of cantilever-based sensors. |
| 收录类别 | SCI |
| 资助信息 | National Basic Research Program of China [2006DFB02020, 2007CB936800]; Chinese Academy of Sciences |
| 语种 | 英语 |
| 公开日期 | 2013-09-17 |
| 源URL | [http://ir.iphy.ac.cn/handle/311004/37043]  |
| 专题 | 物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文 |
| 推荐引用方式 GB/T 7714 | Guan, ZQ,Luo, G,Montelius, L,et al. Electromechanical Behavior of Interdigitated SiO2 Cantilever Arrays[J]. CHINESE PHYSICS LETTERS,2010,27(2). |
| APA | Guan, ZQ,Luo, G,Montelius, L,&Xu, HX.(2010).Electromechanical Behavior of Interdigitated SiO2 Cantilever Arrays.CHINESE PHYSICS LETTERS,27(2). |
| MLA | Guan, ZQ,et al."Electromechanical Behavior of Interdigitated SiO2 Cantilever Arrays".CHINESE PHYSICS LETTERS 27.2(2010). |
入库方式： OAI收割
来源：物理研究所
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