Electron field emission from silicon tip arrays coated by magnetron sputtering carbon nitride film
文献类型：期刊论文
| 作者 | Li, JJ ; Zheng, WT ; Gu, CZ ; Jin, ZS |
| 刊名 | SOLID STATE COMMUNICATIONS
 |
| 出版日期 | 2004 |
| 卷号 | 132期号:3-4页码:253 |
| 关键词 | EMITTER CNX |
| ISSN号 | 0038-1098 |
| 通讯作者 | Li, JJ: Chinese Acad Sci, Inst Phys, State Key Lab Surface Phys, POB 603, Beijing 100080, Peoples R China. |
| 中文摘要 | The field emission properties of silicon tip arrays coated by magnetron sputtering carbon nitride films (CNx) were investigated. The coated Si tip arrays with the height of 3 mum and the density of 106 tips/cm(2) exhibit good field emission properties with the lowest threshold field of 2V/mum, which is much better than that of uncoated Si tip arrays. The results demonstrate that CNx films effectively lower a surface potential barrier to improve the electron field emission properties of silicon tips. In particular, it was found that the variation of deposition conditions of CNx films coated on the Si tips had a significant influence on the field emission property of Si tip arrays. The dc substrate bias could reduce the field emission property of silicon tips, but a higher nitrogen partial pressure and moderate input power are favorable to the enhancement of the field emission property of Si tips. The effects of deposition conditions on the electron field emission are attributed to the change Of sp(2) C-N bonds content in the CNx films and the apex shape of Si tip. (C) 2004 Elsevier Ltd. All rights reserved. |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2013-09-17 |
| 源URL | [http://ir.iphy.ac.cn/handle/311004/37083]  |
| 专题 | 物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文 |
| 推荐引用方式 GB/T 7714 | Li, JJ,Zheng, WT,Gu, CZ,et al. Electron field emission from silicon tip arrays coated by magnetron sputtering carbon nitride film[J]. SOLID STATE COMMUNICATIONS,2004,132(3-4):253. |
| APA | Li, JJ,Zheng, WT,Gu, CZ,&Jin, ZS.(2004).Electron field emission from silicon tip arrays coated by magnetron sputtering carbon nitride film.SOLID STATE COMMUNICATIONS,132(3-4),253. |
| MLA | Li, JJ,et al."Electron field emission from silicon tip arrays coated by magnetron sputtering carbon nitride film".SOLID STATE COMMUNICATIONS 132.3-4(2004):253. |
入库方式： OAI收割
来源：物理研究所
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