Enhanced electron emission from diamond film deposited on pre-seeded Si substrate with nanosized diamond power
文献类型：期刊论文
| 作者 | Gu, CZ |
| 刊名 | APPLIED SURFACE SCIENCE
 |
| 出版日期 | 2005 |
| 卷号 | 251期号:1-4页码:225 |
| 关键词 | FIELD-EMISSION MECHANISM CATHODES |
| ISSN号 | 0169-4332 |
| 通讯作者 | Gu, CZ: Natl Inst Mat Sci, Int Ctr Young Scientist, 1-1 Namiki, Tsukuba, Ibaraki 3050044, Japan. |
| 中文摘要 | Diamond film was synthesized by microwave plasma chemical vapor deposition (MWPCVD) method. The deposition process of diamond film on 4-in. pre-seeded mirror polished silicon wafer was divided into four steps: (a) seeding nano-diamond powder on Si surface; (b) annealing for increasing the adsorbed strength between diamond powder and substrate; (c) diamond film growth; (d) bombarding with H+ ion for decreasing film stress and obtaining planar field emission from diamond film with large area. Scanning electron microscopy (SEM), Raman spectroscopy and stress measurement system were used to characterize the structure and property of diamond film. The electron emission from large area diamond film on seeded substrate was described and compared with that from diamond film deposited on Si substrate scratched by diamond powder. The results suggested that low-field electron emission and high emission current could be obtained from diamond film deposited on seeded substrate due to the reduction of interface energy barrier for electron tunneling. A threshold field of 3.0 V/mu m and emission current density of 1 mA/cm(2) at 30 V/mu m were achieved. (c) 2005 Elsevier B.V. All rights reserved. |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2013-09-17 |
| 源URL | [http://ir.iphy.ac.cn/handle/311004/37344]  |
| 专题 | 物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文 |
| 推荐引用方式 GB/T 7714 | Gu, CZ. Enhanced electron emission from diamond film deposited on pre-seeded Si substrate with nanosized diamond power[J]. APPLIED SURFACE SCIENCE,2005,251(1-4):225. |
| APA | Gu, CZ.(2005).Enhanced electron emission from diamond film deposited on pre-seeded Si substrate with nanosized diamond power.APPLIED SURFACE SCIENCE,251(1-4),225. |
| MLA | Gu, CZ."Enhanced electron emission from diamond film deposited on pre-seeded Si substrate with nanosized diamond power".APPLIED SURFACE SCIENCE 251.1-4(2005):225. |
入库方式： OAI收割
来源：物理研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。