Enhanced hardness in B-doped ZnO thin films on fused quartz substrates by pulsed-laser deposition
文献类型：期刊论文
| 作者 | Zhao, SQ ; Zhou, YL ; Liu, YZ ; Zhao, K ; Wang, SF ; Xiang, WF ; Liu, Z ; Han, P ; Zhang, Z ; Chen, ZH ; Lu, HB ; Jin, KJ ; Cheng, BL ; Yang, GZ |
| 刊名 | APPLIED SURFACE SCIENCE
 |
| 出版日期 | 2006 |
| 卷号 | 253期号:2页码:726 |
| 关键词 | ZINC-OXIDE FILMS NANOINDENTATION SAPPHIRE |
| ISSN号 | 0169-4332 |
| 通讯作者 | Zhou, YL: Chinese Acad Sci, Beijing Natl Lab Condensed Matter Phys, Inst Phys, Beijing 100080, Peoples R China. |
| 中文摘要 | B-doped ZnO thin films have been fabricated on fused quartz substrates using boron-ZnO mosaic target by pulsed-laser deposition technique, and the mechanical properties have been studied by nanoindentation continuous stiffness measurement technique and transmission electron microscope (TEM). Nanoindentation measurement revealed that the hardness of B-doped ZnO films, 9.32 +/- 0.90 to 12.10 +/- 1.00 GPa, is much greater than that of undoped ZnO films and very close to that of traditional semiconductor Si. The mean transmittance (%) is larger than 81% in the visible range (380-780 nm) for all the films, and the Hall effect measurement showed that the carrier density is around 2 x 10(20) cm(-3) and the resistivity lower than 3 x 10(-3) Omega cm. TEM characteristics show undoped thin films have more amorphous area between grains while the B-doped ZnO films have thin grain boundaries. We suggest that the grain boundaries act as the strain compensation sites and the decrease in thickness of grain boundaries enhances the hardness of the B-doped ZnO films. (c) 2006 Elsevier B.V. All rights reserved. |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2013-09-17 |
| 源URL | [http://ir.iphy.ac.cn/handle/311004/37353]  |
| 专题 | 物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文 |
| 推荐引用方式 GB/T 7714 | Zhao, SQ,Zhou, YL,Liu, YZ,et al. Enhanced hardness in B-doped ZnO thin films on fused quartz substrates by pulsed-laser deposition[J]. APPLIED SURFACE SCIENCE,2006,253(2):726. |
| APA | Zhao, SQ.,Zhou, YL.,Liu, YZ.,Zhao, K.,Wang, SF.,...&Yang, GZ.(2006).Enhanced hardness in B-doped ZnO thin films on fused quartz substrates by pulsed-laser deposition.APPLIED SURFACE SCIENCE,253(2),726. |
| MLA | Zhao, SQ,et al."Enhanced hardness in B-doped ZnO thin films on fused quartz substrates by pulsed-laser deposition".APPLIED SURFACE SCIENCE 253.2(2006):726. |
入库方式： OAI收割
来源：物理研究所
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