Epitaxial growth of YBa2Cu3O7-delta thin films on silicon-on-insulator substrates by pulsed laser deposition
文献类型：期刊论文
| 作者 | Wang, P ; Li, J ; Peng, W ; Chen, K ; Lang, PL ; Xiang, JY ; Chen, YF ; Xu, XP ; Tian, HY ; Zheng, DN |
| 刊名 | SUPERCONDUCTOR SCIENCE & TECHNOLOGY
 |
| 出版日期 | 2004 |
| 卷号 | 17期号:6页码:804 |
| 关键词 | BA-CU-O ENERGY ELECTRON-DIFFRACTION BUFFER LAYERS OXIDE SI PRESSURE |
| ISSN号 | 0953-2048 |
| 通讯作者 | Wang, P: Chinese Acad Sci, Natl Lab Supercond, Inst Phys, Beijing 100080, Peoples R China. |
| 中文摘要 | High quality superconducting YBa2Cu3O7-delta (YBCO) thin films have been successfully deposited on silicon-on-insulator (SOI) substrates buffered by an yttria-stabilized zirconia (YSZ) layer using the in situ pulsed laser deposition (PLD) method. X-ray diffraction (XRD) theta-2theta-scan and phi-scan, and reflection high energy electron diffraction (RHEED), indicate that both the YSZ and YBCO thin films are of high crystallinity and good lattice orientation. Atomic force microscopy (AFM) shows that the root mean square roughness R-q of YSZ thin films is less than 0.9 nm in an area of I mum x I mum, and that of YBCO thin films is about 3 nm in an area of 2 /tm x 2 mum. The zero-resistance temperature T-C0 of the YBCO/YSZ/SOI multilayers is up to 88 K, measured by a four-probe method. However, scanning electron microscopy (SEM) demonstrates many clear cracks in YBCO thin films due to the lattice constant and thermal expansion coefficient mismatch between SOI and YBCO. The crack width changes with the thickness of YBCO thin films. |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2013-09-17 |
| 源URL | [http://ir.iphy.ac.cn/handle/311004/37531]  |
| 专题 | 物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文 |
| 推荐引用方式 GB/T 7714 | Wang, P,Li, J,Peng, W,et al. Epitaxial growth of YBa2Cu3O7-delta thin films on silicon-on-insulator substrates by pulsed laser deposition[J]. SUPERCONDUCTOR SCIENCE & TECHNOLOGY,2004,17(6):804. |
| APA | Wang, P.,Li, J.,Peng, W.,Chen, K.,Lang, PL.,...&Zheng, DN.(2004).Epitaxial growth of YBa2Cu3O7-delta thin films on silicon-on-insulator substrates by pulsed laser deposition.SUPERCONDUCTOR SCIENCE & TECHNOLOGY,17(6),804. |
| MLA | Wang, P,et al."Epitaxial growth of YBa2Cu3O7-delta thin films on silicon-on-insulator substrates by pulsed laser deposition".SUPERCONDUCTOR SCIENCE & TECHNOLOGY 17.6(2004):804. |
入库方式： OAI收割
来源：物理研究所
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