Fabrication and spectra-measurement of high Q photonic crystal cavity on silicon slabs
文献类型：期刊论文
| 作者 | Zhou, CZ ; Wang, C ; Li, ZY |
| 刊名 | ACTA PHYSICA SINICA
 |
| 出版日期 | 2012 |
| 卷号 | 61期号:1 |
| 关键词 | SINGLE QUANTUM-DOT WAVE-GUIDE DROP FILTER NANOCAVITY |
| ISSN号 | 1000-3290 |
| 通讯作者 | Zhou, CZ: Chinese Acad Sci, Inst Phys, Beijing Natl Lab Condensed Matter Phys, Lab Opt Phys, Beijing 100190, Peoples R China. |
| 中文摘要 | We fabricate a high Q photonic crystal cavity on the top of SOI (silicon on insulator) with EBL (electron beam lithography) and ICP (inductively coupled plasma). The value of Q can reach 7 x 10(4). It provides basic condition for the following experiments, for example for the study of interaction between light and substance. The high Q cavity also provides good circumstance for the quantum information. The theoretical result of the value of Q is 1.2 x 10(5) from FDTD (finite difference time domain) simulation. |
| 收录类别 | SCI |
| 资助信息 | National Natural Science Foundation of China [10525419]; National Basic Research Program of China [2011CB922002] |
| 语种 | 中文 |
| 公开日期 | 2013-09-17 |
| 源URL | [http://ir.iphy.ac.cn/handle/311004/37902]  |
| 专题 | 物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文 |
| 推荐引用方式 GB/T 7714 | Zhou, CZ,Wang, C,Li, ZY. Fabrication and spectra-measurement of high Q photonic crystal cavity on silicon slabs[J]. ACTA PHYSICA SINICA,2012,61(1). |
| APA | Zhou, CZ,Wang, C,&Li, ZY.(2012).Fabrication and spectra-measurement of high Q photonic crystal cavity on silicon slabs.ACTA PHYSICA SINICA,61(1). |
| MLA | Zhou, CZ,et al."Fabrication and spectra-measurement of high Q photonic crystal cavity on silicon slabs".ACTA PHYSICA SINICA 61.1(2012). |
入库方式： OAI收割
来源：物理研究所
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