Fabrication of graphite nano-structures
文献类型：期刊论文
| 作者 | Liu, SP ; Zhou, F ; Jin, AZ ; Yang, HF ; Ma, YJ ; Li, H ; Gu, CZ ; Lu, L ; Jiang, B ; Zheng, QS ; Wang, S ; Peng, LM |
| 刊名 | ACTA PHYSICA SINICA
 |
| 出版日期 | 2005 |
| 卷号 | 54期号:9页码:4251 |
| ISSN号 | 1000-3290 |
| 关键词 | DEVICES |
| 通讯作者 | Lu, L: Chinese Acad Sci, Beijing Natl Lab Condensed Matter Phys, Beijing 100080, Peoples R China. |
| 中文摘要 | Nano-sized graphite patterns were obtained by tailoring graphite sheets using different methods. With focused ion beam etching we are able to produce grooves of minimum width similar to 30 mm. However, at the edges of the grooves there deposit with Ga-C compound which prevents the easy cleavage of the graphite sheets. With electron beam lithography and reactive ion etching techniques we are able to produce graphite patterns of sizes down to 50 mm. Three different types of masks are tested, and the results are compared and discussed. |
| 收录类别 | SCI |
| 语种 | 中文 |
| 公开日期 | 2013-09-17 |
| 源URL | [http://ir.iphy.ac.cn/handle/311004/37926]  |
| 专题 | 物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文 |
| 推荐引用方式 GB/T 7714 | Liu, SP,Zhou, F,Jin, AZ,et al. Fabrication of graphite nano-structures[J]. ACTA PHYSICA SINICA,2005,54(9):4251. |
| APA | Liu, SP.,Zhou, F.,Jin, AZ.,Yang, HF.,Ma, YJ.,...&Peng, LM.(2005).Fabrication of graphite nano-structures.ACTA PHYSICA SINICA,54(9),4251. |
| MLA | Liu, SP,et al."Fabrication of graphite nano-structures".ACTA PHYSICA SINICA 54.9(2005):4251. |
入库方式： OAI收割
来源：物理研究所
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