Fabrication of high-frequency moire gratings for microscopic deformation measurement using focused ion beam milling
文献类型：期刊论文
| 作者 | Li, YJ ; Xie, HM ; Guo, BQ ; Luo, Q ; Gu, CZ ; Xu, MQ |
| 刊名 | JOURNAL OF MICROMECHANICS AND MICROENGINEERING
 |
| 出版日期 | 2010 |
| 卷号 | 20期号:5 |
| ISSN号 | 0960-1317 |
| 关键词 | MECHANICAL-PROPERTIES MICRO-DEFORMATION MEMS TECHNOLOGY FILMS STRESS |
| 通讯作者 | Xie, HM: Tsinghua Univ, Dept Engn Mech, AML, Beijing 100084, Peoples R China. |
| 中文摘要 | In this paper, the fabrication technique of high-frequency moire gratings with a focused ion beam (FIB) is studied thoroughly and comprehensively. The concept is proposed for the first time that the frequency and the size of the grating must be designed to meet the requirements of measurement accuracy and the view field at the same time. Some skills are summarized to get high quality gratings. To check its ability for high temperature use, a grating with a frequency of 2000 lines mm(-1) is fabricated on the amorphous SiC micro-beam. SEM moire are recorded at room temperature and after high temperature of 350 degrees C and 550 degrees C respectively. The fringes are distinct at all stages except for a contrast degradation after high temperature, which demonstrates that SEM moire combined with the grating fabricated by FIB milling is a promising tool to measure microscopic deformation of micro-device at room temperature and high temperature. |
| 资助信息 | National Basic Research Program of China [2010CB631005]; National Natural Science Foundation of China [10625209, 10732080, 90916010]; Beijing Natural Sciences Foundation [3072007] |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2013-09-17 |
| 源URL | [http://ir.iphy.ac.cn/handle/311004/37929]  |
| 专题 | 物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文 |
| 推荐引用方式 GB/T 7714 | Li, YJ,Xie, HM,Guo, BQ,et al. Fabrication of high-frequency moire gratings for microscopic deformation measurement using focused ion beam milling[J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING,2010,20(5). |
| APA | Li, YJ,Xie, HM,Guo, BQ,Luo, Q,Gu, CZ,&Xu, MQ.(2010).Fabrication of high-frequency moire gratings for microscopic deformation measurement using focused ion beam milling.JOURNAL OF MICROMECHANICS AND MICROENGINEERING,20(5). |
| MLA | Li, YJ,et al."Fabrication of high-frequency moire gratings for microscopic deformation measurement using focused ion beam milling".JOURNAL OF MICROMECHANICS AND MICROENGINEERING 20.5(2010). |
入库方式： OAI收割
来源：物理研究所
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