中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Factors affecting the graphitization behavior of the powder source during seeded sublimation growth of SiC bulk crystal

文献类型:期刊论文

作者Li, HQ ; Chen, XL ; Ni, DQ ; Wu, X
刊名JOURNAL OF CRYSTAL GROWTH
出版日期2003
卷号258期号:1-2页码:100
关键词SILICON-CARBIDE SINGLE-CRYSTALS
ISSN号0022-0248
通讯作者Li, HQ: Chinese Acad Sci, Inst Phys, POB 603-50, Beijing 100080, Peoples R China.
中文摘要The effects of temperature, temperature gradient and the argon pressure on the graphitization of the powder source during seeded sublimation growth of SiC bulk crystal are investigated. It is found that the graphitization tendency of the powder source becomes obvious with temperature, especially above 2600 K. A higher growth temperature, a larger temperature gradient from the powder source to the growing crystal or a lower argon pressure corresponds to a higher graphitization rate of the powder source. The establishment of a proper temperature gradient in the powder source enabling vapor transporting from the lower part of the powder to the surface is critical to prevent the graphitization of the powder surface. This requires a proper control of the distance between the powder surface and the highest temperature line in the furnace during growth. (C) 2003 Elsevier B.V. All rights reserved.
收录类别SCI
语种英语
公开日期2013-09-17
源URL[http://ir.iphy.ac.cn/handle/311004/37989]  
专题物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文
推荐引用方式
GB/T 7714
Li, HQ,Chen, XL,Ni, DQ,et al. Factors affecting the graphitization behavior of the powder source during seeded sublimation growth of SiC bulk crystal[J]. JOURNAL OF CRYSTAL GROWTH,2003,258(1-2):100.
APA Li, HQ,Chen, XL,Ni, DQ,&Wu, X.(2003).Factors affecting the graphitization behavior of the powder source during seeded sublimation growth of SiC bulk crystal.JOURNAL OF CRYSTAL GROWTH,258(1-2),100.
MLA Li, HQ,et al."Factors affecting the graphitization behavior of the powder source during seeded sublimation growth of SiC bulk crystal".JOURNAL OF CRYSTAL GROWTH 258.1-2(2003):100.

入库方式: OAI收割

来源:物理研究所

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