Field emission properties of diamond-like carbon films annealed at different temperatures
文献类型:期刊论文
作者 | Li, JJ ; Gu, CZ ; Peng, HY ; Wu, HH ; Zheng, WT ; Jin, ZS |
刊名 | APPLIED SURFACE SCIENCE
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出版日期 | 2005 |
卷号 | 251期号:1-4页码:236 |
关键词 | TETRAHEDRAL AMORPHOUS-CARBON THERMAL-STABILITY DEPOSITION PARAMETERS DISORDER SILICON |
ISSN号 | 0169-4332 |
通讯作者 | Li, JJ: Chinese Acad Sci, Inst Phys, Lab Microfabricat, POB 603, Beijing 100080, Peoples R China. |
中文摘要 | Effect of annealing on the field emission properties of diamond-like carbon (DLC) films deposited by high power excime laser technique was studied. Raman spectrometry and X-ray photoelectron spectrometry (XPS) were used to determine the chemical bonding structural change of the annealed DLC films. It was found that the annealing transformed gradually DLC films into a graphitic structure as annealing temperature was increased to more than 600 degrees C, simultaneously field emission properties of DLC films were enhanced markedly. Graphitization of DLC films induced by annealing caused the formation of a large fraction of sp(2) C in the DLC films, which played an important role in the enhancement of field emission properties for DLC films. Rich sp(2) C cluster acted as a conduction part in the films could increase the conductivity of DLC films and lower the effective work function of DLC films, consequently improve field emission properties of DLC films. (c) 2005 Elsevier B.V. All rights reserved. |
收录类别 | SCI |
语种 | 英语 |
公开日期 | 2013-09-17 |
源URL | [http://ir.iphy.ac.cn/handle/311004/38162] ![]() |
专题 | 物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文 |
推荐引用方式 GB/T 7714 | Li, JJ,Gu, CZ,Peng, HY,et al. Field emission properties of diamond-like carbon films annealed at different temperatures[J]. APPLIED SURFACE SCIENCE,2005,251(1-4):236. |
APA | Li, JJ,Gu, CZ,Peng, HY,Wu, HH,Zheng, WT,&Jin, ZS.(2005).Field emission properties of diamond-like carbon films annealed at different temperatures.APPLIED SURFACE SCIENCE,251(1-4),236. |
MLA | Li, JJ,et al."Field emission properties of diamond-like carbon films annealed at different temperatures".APPLIED SURFACE SCIENCE 251.1-4(2005):236. |
入库方式: OAI收割
来源:物理研究所
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