中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Getting high-efficiency photoluminescence from Si nanocrystals in SiO2 matrix

文献类型:期刊论文

作者Wang, YQ ; Kong, GL ; Chen, WD ; Diao, HW ; Chen, CY ; Zhang, SB ; Liao, XB
刊名APPLIED PHYSICS LETTERS
出版日期2002
卷号81期号:22页码:4174
ISSN号0003-6951
关键词VISIBLE-LIGHT EMISSION POROUS SILICON QUANTUM CONFINEMENT SUPERLATTICES LUMINESCENCE FABRICATION RECRYSTALLIZATION
通讯作者Wang, YQ: Chinese Acad Sci, Inst Semicond, State Key Lab Surface Phys, Beijing 100083, Peoples R China.
中文摘要Silicon nanocrystals in SiO2 matrix are fabricated by plasma enhanced chemical vapor deposition followed by thermal annealing. The structure and photoluminescence (PL) of the resulting films is investigated as a function of deposition temperature. Drastic improvement of PL efficiency up to 12% is achieved when the deposition temperature is reduced from 250 degreesC to room temperature. Low-temperature deposition is found to result in a high quality final structure of the films in which the silicon nanocrystals are nearly strain-free, and the Si/SiO2 interface sharp. The demonstration of the superior structural and optical properties of the films represents an important step towards the development of silicon-based light emitters. (C) 2002 American Institute of Physics.
收录类别SCI
语种英语
公开日期2013-09-17
源URL[http://ir.iphy.ac.cn/handle/311004/38707]  
专题物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文
推荐引用方式
GB/T 7714
Wang, YQ,Kong, GL,Chen, WD,et al. Getting high-efficiency photoluminescence from Si nanocrystals in SiO2 matrix[J]. APPLIED PHYSICS LETTERS,2002,81(22):4174.
APA Wang, YQ.,Kong, GL.,Chen, WD.,Diao, HW.,Chen, CY.,...&Liao, XB.(2002).Getting high-efficiency photoluminescence from Si nanocrystals in SiO2 matrix.APPLIED PHYSICS LETTERS,81(22),4174.
MLA Wang, YQ,et al."Getting high-efficiency photoluminescence from Si nanocrystals in SiO2 matrix".APPLIED PHYSICS LETTERS 81.22(2002):4174.

入库方式: OAI收割

来源:物理研究所

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