Growth and surface analysis of BaTiO3 ultrathin film fabricated by laser molecular beam epitaxy
文献类型：期刊论文
| 作者 | Cui, DF ; Chen, ZH ; Zhao, T ; Chen, F ; Lu, HB ; Zhou, YL ; Yang, GZ ; Huang, HZ ; Zhang, HX |
| 刊名 | MICROELECTRONIC ENGINEERING
 |
| 出版日期 | 2000 |
| 卷号 | 18660页码:601 |
| 关键词 | SRTIO3 SPECTROSCOPY SUBSTRATE |
| ISSN号 | 0167-9317 |
| 通讯作者 | Cui, DF: Chinese Acad Sci, Inst Phys, Lab Opt Phys, POB 603, Beijing 100080, Peoples R China. |
| 中文摘要 | The ferroelectric BaTiO3(001) ultrathin film (10 nm) was grown epitaxially on SrTiO3(001) substrate by laser molecular beam epitaxy (MBE). The growth process of the BaTiO3 thin film was characterized by in situ intensity oscillation of reflection high energy electron diffraction, showing a unit cell layer-by-layer growth mode. The atomically smooth surface of BaTiO3 film has been observed by atomic force microscopy with a root mean square surface roughness of 0.2 nm. The top-most surface for the high c-oriented BaTiO3 thin film was analyzed by angle-resolved X-ray photoelectron spectroscopy (ARXPS), indicating the BaTiO3 film is predominantly terminated with TiO2 atomic plane. (C) 2000 Elsevier Science B.V. All rights reserved. |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2013-09-17 |
| 源URL | [http://ir.iphy.ac.cn/handle/311004/38922]  |
| 专题 | 物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文 |
| 推荐引用方式 GB/T 7714 | Cui, DF,Chen, ZH,Zhao, T,et al. Growth and surface analysis of BaTiO3 ultrathin film fabricated by laser molecular beam epitaxy[J]. MICROELECTRONIC ENGINEERING,2000,18660:601. |
| APA | Cui, DF.,Chen, ZH.,Zhao, T.,Chen, F.,Lu, HB.,...&Zhang, HX.(2000).Growth and surface analysis of BaTiO3 ultrathin film fabricated by laser molecular beam epitaxy.MICROELECTRONIC ENGINEERING,18660,601. |
| MLA | Cui, DF,et al."Growth and surface analysis of BaTiO3 ultrathin film fabricated by laser molecular beam epitaxy".MICROELECTRONIC ENGINEERING 18660(2000):601. |
入库方式： OAI收割
来源：物理研究所
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