Growth of SrTiO3(110) film by oxide molecular beam epitaxy with feedback control
文献类型：期刊论文
| 作者 | Feng, JG ; Yang, F ; Wang, ZM ; Yang, Y ; Gu, L ; Zhang, JD ; Guo, JD |
| 刊名 | AIP ADVANCES
 |
| 出版日期 | 2012 |
| 卷号 | 2期号:4 |
| 关键词 | THIN-FILMS INSULATOR TRANSITIONS DEPENDENCE |
| ISSN号 | 2158-3226 |
| 通讯作者 | Feng, JG: Chinese Acad Sci, Beijing Natl Lab Condensed Matter Phys, Beijing 100190, Peoples R China. |
| 中文摘要 | By controlling the growth of complex oxide films with atomic precision, emergent phenomena and fascinating properties have been discovered, and even been manipulated. With oxide molecular beam epitaxy (OMBE) we grow high-quality SrTiO3(110) films by evaporating Sr and Ti metals with separate controls of the open/close timing of the shutters. The incident electron beam angle of the reflective high energy electron diffraction (RHEED) is adjusted to make the (01) beam sensitive to surface chemical concentration. By monitoring such an intensity, we tune the shutter timing to synchronize the evaporation amount of Sr and Ti in real-time. The intensity is further used as a feedback control signal for automatic growth optimization to fully compensate the possible fluctuation of the source flux rates upon extended growth. A 22 nm-thick film is obtained with the precision of metal cation stoichiometry better than 0.5%. Copyright 2012 Author(s). This article is distributed under a Creative Commons Attribution 3.0 Unported License. [http://dx.doi.org/10.1063/1.4773555] |
| 收录类别 | SCI |
| 资助信息 | 973 Program of China [2012CB921700]; NSFC [11027406]; Beijing Municipal Commission of Education |
| 语种 | 英语 |
| 公开日期 | 2013-09-17 |
| 源URL | [http://ir.iphy.ac.cn/handle/311004/39000]  |
| 专题 | 物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文 |
| 推荐引用方式 GB/T 7714 | Feng, JG,Yang, F,Wang, ZM,et al. Growth of SrTiO3(110) film by oxide molecular beam epitaxy with feedback control[J]. AIP ADVANCES,2012,2(4). |
| APA | Feng, JG.,Yang, F.,Wang, ZM.,Yang, Y.,Gu, L.,...&Guo, JD.(2012).Growth of SrTiO3(110) film by oxide molecular beam epitaxy with feedback control.AIP ADVANCES,2(4). |
| MLA | Feng, JG,et al."Growth of SrTiO3(110) film by oxide molecular beam epitaxy with feedback control".AIP ADVANCES 2.4(2012). |
入库方式： OAI收割
来源：物理研究所
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