High-Resolution Nanosphere Lithography (NSL) to Fabricate Highly-Ordered ZnO Nanorod Arrays
文献类型：期刊论文
| 作者 | Zhang, XX ; Zhang, LH ; Gao, M ; Zhou, WY ; Xie, SS |
| 刊名 | JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
 |
| 出版日期 | 2010 |
| 卷号 | 10期号:11页码:7432 |
| 关键词 | SEMICONDUCTOR NANOWIRES PATTERNED GROWTH PHYSICS |
| ISSN号 | 1533-4880 |
| 通讯作者 | Xie, SS: Peking Univ, Key Lab Phys & Chem Nanodevices, Beijing 100871, Peoples R China. |
| 中文摘要 | Here we report our successful development of a high-resolution, low-cost, simple and convenient technique based on nanosphere lithography (NSL) to fabricate large-scale periodic gold nanoparticle pattern, which is the most common catalyst material in the synthesis of nanostructure and also a feature material for surface plasmon resonation (SPR) research. In order to improve lithography resolution by PS nanosphere self-assembling monolayer (SAM), we adapted the following steps in our fabrication strategy. The original continuous etching by oxygen plasma was replaced by multiple short treatments to avoid heating effect. In addition, direct oxidation was utilized to remove the nanospheres instead of the supersonic process. Using the obtained Au nanoparticle pattern, ZnO nanorod arrays with an average diameter of 50 nm were easily obtained by 600 nm PS nanospheres SAM, which was even smaller than the minimum size by utilizing 400 nm nanospheres SAM in the previous work. Thus, we succeeded in the fabrication of highly-ordered ZnO nanorod arrays with largely tunable diameter by this higher-resolution nanosphere lithography. We also present X-ray diffraction (XRD), transmission electron microscopy (TEM), photoluminescence (PL) and Raman results of our as-grown samples, indicating great crystallization quality and optical property. |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2013-09-17 |
| 源URL | [http://ir.iphy.ac.cn/handle/311004/39433]  |
| 专题 | 物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文 |
| 推荐引用方式 GB/T 7714 | Zhang, XX,Zhang, LH,Gao, M,et al. High-Resolution Nanosphere Lithography (NSL) to Fabricate Highly-Ordered ZnO Nanorod Arrays[J]. JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY,2010,10(11):7432. |
| APA | Zhang, XX,Zhang, LH,Gao, M,Zhou, WY,&Xie, SS.(2010).High-Resolution Nanosphere Lithography (NSL) to Fabricate Highly-Ordered ZnO Nanorod Arrays.JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY,10(11),7432. |
| MLA | Zhang, XX,et al."High-Resolution Nanosphere Lithography (NSL) to Fabricate Highly-Ordered ZnO Nanorod Arrays".JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY 10.11(2010):7432. |
入库方式： OAI收割
来源：物理研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。