High-visibility intensity interference and ghost imaging with pseudo-thermal light
文献类型：期刊论文
| 作者 | Agafonov, IN ; Chekhova, MV ; Iskhakov, TS ; Wu, LA |
| 刊名 | JOURNAL OF MODERN OPTICS
 |
| 出版日期 | 2009 |
| 卷号 | 56期号:2-3页码:422 |
| 关键词 | STATE |
| ISSN号 | 0950-0340 |
| 通讯作者 | Chekhova, MV: Moscow MV Lomonosov State Univ, Dept Phys, Moscow, Russia. |
| 中文摘要 | Quantitative evaluation of the structure deformation of microfabricated electromechanical systems is of importance for the design and functional control of microsystems. In this investigation, a novel digital geometric phase technique was developed to meet the deformation evaluation requirement of microelectromechanical systems (MEMS). The technique is performed on the basis of regular artificial lattices, instead of a natural atom lattice. The regular artificial lattices with a pitch ranging from micrometer to nanometer will be directly fabricated on the measured surface of MEMS devices by using a focused ion beam (FIB). Phase information can be obtained from the Bragg filtered images after fast Fourier transform (FFT) and inverse fast Fourier transform (IFFT) of the scanning electronic microscope (SEM) images. Then the in-plane displacement field and the local strain field related to the phase information will be evaluated. The obtained results show that the technique can be well applied to deformation measurement with nanometer sensitivity and stiction force estimation of a MEMS device. |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2013-09-17 |
| 源URL | [http://ir.iphy.ac.cn/handle/311004/39466]  |
| 专题 | 物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文 |
| 推荐引用方式 GB/T 7714 | Agafonov, IN,Chekhova, MV,Iskhakov, TS,et al. High-visibility intensity interference and ghost imaging with pseudo-thermal light[J]. JOURNAL OF MODERN OPTICS,2009,56(2-3):422. |
| APA | Agafonov, IN,Chekhova, MV,Iskhakov, TS,&Wu, LA.(2009).High-visibility intensity interference and ghost imaging with pseudo-thermal light.JOURNAL OF MODERN OPTICS,56(2-3),422. |
| MLA | Agafonov, IN,et al."High-visibility intensity interference and ghost imaging with pseudo-thermal light".JOURNAL OF MODERN OPTICS 56.2-3(2009):422. |
入库方式： OAI收割
来源：物理研究所
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