Hydrogenated amorphous silicon films with significantly improved stability
文献类型：期刊论文
| 作者 | Sheng, SR ; Liao, XB ; Ma, ZX ; Yue, GZ ; Wang, YQ ; Kong, GL |
| 刊名 | SOLAR ENERGY MATERIALS AND SOLAR CELLS
 |
| 出版日期 | 2001 |
| 卷号 | 68期号:1页码:123 |
| 关键词 | A-SI-H CONSTANT PHOTOCURRENT METHOD PERSISTENT PHOTOCONDUCTIVITY URBACH EDGE SOLAR-CELLS GAP STATES ABSORPTION DENSITY SPECTROSCOPY INCREASE |
| ISSN号 | 0927-0248 |
| 通讯作者 | Liao, XB: Chinese Acad Sci, Inst Semicond, State Lab Surface Phys, Beijing 100083, Peoples R China. |
| 中文摘要 | A new regime of plasma-enhanced chemical-vapor deposition (PECVD), referred to as "uninterrupted growth/annealing" method, has been proposed for preparation of high-quality hydrogenated amorphous silicon (a-Si:H) films. By using this regime, the deposition process no longer needs to be interrupted, as done in the chemical annealing or layer by layer deposition, while the growing surface is continuously subjected to an enhanced annealing treatment with atomic hydrogen created in the hydrogen-diluted reactant gas mixture at a relatively high plasma power. The intensity of the hydrogen plasma treatment is controlled at such a level that the deposition conditions of the resultant films approach the threshold for microcrystal formation. In addition, a low level of B-compensation is used to adjust the position of the Fermi level close to the midgap. Under these conditions, we find that the stability and optoelectronic properties of a-Si:H films have been significantly improved. (C) 2001 Elsevier Science B.V. All rights reserved. |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2013-09-17 |
| 源URL | [http://ir.iphy.ac.cn/handle/311004/39538]  |
| 专题 | 物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文 |
| 推荐引用方式 GB/T 7714 | Sheng, SR,Liao, XB,Ma, ZX,et al. Hydrogenated amorphous silicon films with significantly improved stability[J]. SOLAR ENERGY MATERIALS AND SOLAR CELLS,2001,68(1):123. |
| APA | Sheng, SR,Liao, XB,Ma, ZX,Yue, GZ,Wang, YQ,&Kong, GL.(2001).Hydrogenated amorphous silicon films with significantly improved stability.SOLAR ENERGY MATERIALS AND SOLAR CELLS,68(1),123. |
| MLA | Sheng, SR,et al."Hydrogenated amorphous silicon films with significantly improved stability".SOLAR ENERGY MATERIALS AND SOLAR CELLS 68.1(2001):123. |
入库方式： OAI收割
来源：物理研究所
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