Influence of ion species ratio on grid-enhanced plasma source ion implantation
文献类型：期刊论文
| 作者 | Wang, JL ; Zhang, GL ; Liu, JF ; Wang, YN ; Liu, CZ ; Yang, SZ |
| 刊名 | CHINESE PHYSICS
 |
| 出版日期 | 2004 |
| 卷号 | 13期号:1页码:65 |
| 关键词 | INNER SURFACE MODIFICATION CYLINDRICAL BORE SHEATH DYNAMICS TIN |
| ISSN号 | 1009-1963 |
| 通讯作者 | Wang, JL: Chinese Acad Sci, Inst Phys, POB 603, Beijing 100080, Peoples R China. |
| 中文摘要 | Grid-enhanced plasma source ion implantation (GEPSII) is a newly proposed technique to modify the inner-surface properties of a cylindrical bore. In this paper, a two-ion fluid model describing nitrogen molecular ions N-2(+) and atomic ions N+ is used to investigate the ion sheath dynamics between the grid electrode and the inner surface of a cylindrical bore during the GEPSII process, which is an extension of our previous calculations in which only N-2(+) was considered. Calculations are concentrated on the results of ion dose and impact energy on the target for different ion species ratios in the core plasma. The calculated results show that more atomic ions N+ in the core plasma can raise the ion impact energy and reduce the ion dose on the target. |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2013-09-17 |
| 源URL | [http://ir.iphy.ac.cn/handle/311004/39836]  |
| 专题 | 物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文 |
| 推荐引用方式 GB/T 7714 | Wang, JL,Zhang, GL,Liu, JF,et al. Influence of ion species ratio on grid-enhanced plasma source ion implantation[J]. CHINESE PHYSICS,2004,13(1):65. |
| APA | Wang, JL,Zhang, GL,Liu, JF,Wang, YN,Liu, CZ,&Yang, SZ.(2004).Influence of ion species ratio on grid-enhanced plasma source ion implantation.CHINESE PHYSICS,13(1),65. |
| MLA | Wang, JL,et al."Influence of ion species ratio on grid-enhanced plasma source ion implantation".CHINESE PHYSICS 13.1(2004):65. |
入库方式： OAI收割
来源：物理研究所
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