Inner surface coating of TiN by the grid-enhanced plasma source ion implantation technique
文献类型：期刊论文
| 作者 | Liu, B ; Zhang, GL ; Cheng, DJ ; Liu, CZ ; He, R ; Yang, SZ |
| 刊名 | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS
 |
| 出版日期 | 2001 |
| 卷号 | 19期号:6页码:2958 |
| 关键词 | AUXILIARY ELECTRODE CYLINDRICAL BORE ENERGY |
| ISSN号 | 0734-2101 |
| 通讯作者 | Liu, B: Chinese Acad Sci, Inst Phys, POB 603, Beijing 100080, Peoples R China. |
| 中文摘要 | An inner surface coating of a tubular sample was realized by a new method of grid-enhanced plasma source ion implantation (GEPSII), which is an extension of previous plasma source ion implantation inner surface modification. In GEPSII, a rf plasma core is produced between a center cathode and a grid electrode, which are coaxially arranged inside the tubular sample. Negative high voltage pulses are applied between the grid electrode and the inner surface of the tubular sample, thus an accelerating field for positive ions can be established between the grid electrode and the inner surface of the sample. In addition, particles of solid matter can be introduced into the rf plasma by sputtering the cathode, thus, it is possible to realize metal ion implantation and film deposition. In this article, the concept of GEPSII and some preliminary measurement results of this method are presented, and TiN films are produced on the inner surface of a tubular sample, which is a cylinder of an automobile. The plasma density profiles and plasma electron temperature inside the sample are measured by a Langmuir probe. It is shown that the axial plasma density profile is rather uniform in GEPSII. TiN films were also deposited on single-crystal silicon substrates, which are arranged on the inner surface of the cylinder. (C) 2001 American Vacuum Society. |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2013-09-18 |
| 源URL | [http://ir.iphy.ac.cn/handle/311004/40005]  |
| 专题 | 物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文 |
| 推荐引用方式 GB/T 7714 | Liu, B,Zhang, GL,Cheng, DJ,et al. Inner surface coating of TiN by the grid-enhanced plasma source ion implantation technique[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,2001,19(6):2958. |
| APA | Liu, B,Zhang, GL,Cheng, DJ,Liu, CZ,He, R,&Yang, SZ.(2001).Inner surface coating of TiN by the grid-enhanced plasma source ion implantation technique.JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,19(6),2958. |
| MLA | Liu, B,et al."Inner surface coating of TiN by the grid-enhanced plasma source ion implantation technique".JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS 19.6(2001):2958. |
入库方式： OAI收割
来源：物理研究所
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