Investigation of diamond-like-carbon films prepared by unbalanced magnetron sputtering
文献类型：期刊论文
| 作者 | Yang, WB ; Fan, SH ; Zhang, GL ; Ma, PN ; Zhang, SZ ; Du, J |
| 刊名 | ACTA PHYSICA SINICA
 |
| 出版日期 | 2005 |
| 卷号 | 54期号:10页码:4944 |
| 关键词 | DLC FILMS AMORPHOUS-CARBON GLASS SUBSTRATE PLASMA-CVD DEPOSITION RADIATION COATINGS |
| ISSN号 | 1000-3290 |
| 通讯作者 | Yang, WB: Univ Petr, Beijing 102249, Peoples R China. |
| 中文摘要 | Using unbalanced magnetron sputtering method, smooth, dense and uniforni diamond like carbon films (DLC) with high diamond phase content are deposited. Based on testing and analysis of deposition mechanism, we conclude that with smaller sputtering clusters and higher collision frequency between the sputtering cluster and environment molecules, and more suitable momentum of the sputtering cluster impacting on the substrate, higher content of diamond phase in the film will result. Scanning electron micrograph shows that there are no obvious grains in this film. The micro-hardness is about 11 GPa, bulk elastic modulus is about 120 GPa as tested by nano- indentation. The optical transmittance is about 89%, refraction coefficient is 1.952, and the deposition rule is 0.724 mu m/h as calculated from tire FTIR spectra. |
| 收录类别 | SCI |
| 语种 | 中文 |
| 公开日期 | 2013-09-18 |
| 源URL | [http://ir.iphy.ac.cn/handle/311004/40247]  |
| 专题 | 物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文 |
| 推荐引用方式 GB/T 7714 | Yang, WB,Fan, SH,Zhang, GL,et al. Investigation of diamond-like-carbon films prepared by unbalanced magnetron sputtering[J]. ACTA PHYSICA SINICA,2005,54(10):4944. |
| APA | Yang, WB,Fan, SH,Zhang, GL,Ma, PN,Zhang, SZ,&Du, J.(2005).Investigation of diamond-like-carbon films prepared by unbalanced magnetron sputtering.ACTA PHYSICA SINICA,54(10),4944. |
| MLA | Yang, WB,et al."Investigation of diamond-like-carbon films prepared by unbalanced magnetron sputtering".ACTA PHYSICA SINICA 54.10(2005):4944. |
入库方式： OAI收割
来源：物理研究所
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