Investigation of the strain relaxation and ageing effect of YBa2Cu3O7-delta thin films grown on silicon-on-insulator substrates with yttria-stabilized zirconia buffer layers
文献类型：期刊论文
| 作者 | Wang, P ; Li, J ; Peng, W ; Chen, YF ; Zheng, DN |
| 刊名 | SUPERCONDUCTOR SCIENCE & TECHNOLOGY
 |
| 出版日期 | 2006 |
| 卷号 | 19期号:1页码:51 |
| 关键词 | BA-CU-O PULSED-LASER DEPOSITION SUPERCONDUCTING FILMS CRITICAL THICKNESS EPITAXIAL-GROWTH SI SRTIO3 MGO |
| ISSN号 | 0953-2048 |
| 通讯作者 | Zheng, DN: Chinese Acad Sci, Natl Lab Superconduct, Inst Phys, Beijing 100080, Peoples R China. |
| 中文摘要 | The integration of high-temperature superconductors into advanced semiconductor technology is rather intriguing in the microelectronics field. In this paper, we report on YBa2Cu3O7-delta (YBCO) thin films deposited oil silicon-on-Insulator (SOI) Substrates buffered by yttria-stabilized zirconia (YSZ) layers using the in situ Pulsed laser deposition (PLD) technique. The strain in the YBCO films and the ageing effect caused by the thermally induced cracks are carefully studied. It is believed that because of the adoption of the SOI Substrate, the strain in the YBCO films is greatly relaxed and the quality and stability of YBCO films are rather good, which is advantageous to the superconductive devices. |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2013-09-18 |
| 源URL | [http://ir.iphy.ac.cn/handle/311004/40313]  |
| 专题 | 物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文 |
| 推荐引用方式 GB/T 7714 | Wang, P,Li, J,Peng, W,et al. Investigation of the strain relaxation and ageing effect of YBa2Cu3O7-delta thin films grown on silicon-on-insulator substrates with yttria-stabilized zirconia buffer layers[J]. SUPERCONDUCTOR SCIENCE & TECHNOLOGY,2006,19(1):51. |
| APA | Wang, P,Li, J,Peng, W,Chen, YF,&Zheng, DN.(2006).Investigation of the strain relaxation and ageing effect of YBa2Cu3O7-delta thin films grown on silicon-on-insulator substrates with yttria-stabilized zirconia buffer layers.SUPERCONDUCTOR SCIENCE & TECHNOLOGY,19(1),51. |
| MLA | Wang, P,et al."Investigation of the strain relaxation and ageing effect of YBa2Cu3O7-delta thin films grown on silicon-on-insulator substrates with yttria-stabilized zirconia buffer layers".SUPERCONDUCTOR SCIENCE & TECHNOLOGY 19.1(2006):51. |
入库方式： OAI收割
来源：物理研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。