Measurement of specimen thickness by phase change determination in TEM
文献类型：期刊论文
| 作者 | Croitoru, MD ; Van Dyck, D ; Liu, YZ ; Zhang, Z |
| 刊名 | ULTRAMICROSCOPY
 |
| 出版日期 | 2008 |
| 卷号 | 108期号:12页码:1616 |
| 关键词 | ENERGY-ELECTRON-DIFFRACTION 1ST-PRINCIPLES CALCULATIONS LOSS SPECTROSCOPY FILM THICKNESS DEPOSITION OSCILLATIONS SIMULATION GROWTH SI SEMICONDUCTORS |
| ISSN号 | 0304-3991 |
| 通讯作者 | Croitoru, MD: Univ Antwerp, EMAT, Groenenborgerlaan 171, B-2020 Antwerp, Belgium. |
| 中文摘要 | A non-destructive method for measuring the thickness of thin amorphous films composed of light elements has been developed. The method employs the statistics of the phase of the electron exit wave function. The accuracy of this method has been checked numerically by the multislice method and compared with that based on the mean inner potential. (C) 2008 Elsevier B.V. All rights reserved. |
| 收录类别 | SCI |
| 资助信息 | Scientific Research-Flanders |
| 语种 | 英语 |
| 公开日期 | 2013-09-18 |
| 源URL | [http://ir.iphy.ac.cn/handle/311004/41826]  |
| 专题 | 物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文 |
| 推荐引用方式 GB/T 7714 | Croitoru, MD,Van Dyck, D,Liu, YZ,et al. Measurement of specimen thickness by phase change determination in TEM[J]. ULTRAMICROSCOPY,2008,108(12):1616. |
| APA | Croitoru, MD,Van Dyck, D,Liu, YZ,&Zhang, Z.(2008).Measurement of specimen thickness by phase change determination in TEM.ULTRAMICROSCOPY,108(12),1616. |
| MLA | Croitoru, MD,et al."Measurement of specimen thickness by phase change determination in TEM".ULTRAMICROSCOPY 108.12(2008):1616. |
入库方式： OAI收割
来源：物理研究所
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