Microstructure of the silicon film prepared near the phase transition regime from amorphous to nanocrystalline
文献类型：期刊论文
| 作者 | Zhang, SB ; Liao, XB ; Xu, YY ; Hu, ZH ; Zeng, XB ; Diao, HW ; Luo, MC ; Kong, G |
| 刊名 | QUANTUM CONFINED SEMICONDUCTOR NANOSTRUCTURES
 |
| 出版日期 | 2003 |
| 卷号 | 737页码:679 |
| 关键词 | POLYMORPHOUS SILICON LIGHT-SCATTERING THIN-FILMS SI MICROCRYSTALLINITY ABSORPTION STATES |
| ISSN号 | 0272-9172 |
| 通讯作者 | Zhang, SB: Chinese Acad Sci, Inst Semicond, Ctr Condensed State Phys, State Key Lab Surface Phys, Beijing 100083, Peoples R China. |
| 中文摘要 | A kind of hydrogenated diphasic silicon films has been prepared by a new regime of plasma enhanced chemical vapor deposition (PECVD) near the phase transition regime from amorphous to nanocrystalline. The microstructural properties of the films have been investigated by the micro-Raman and Fourier transformed Infrared (FT-IR) spectra and atom force microscopy (AFM). The obtained Raman spectra show not only the existence of nanoscaled crystallites, but also a notable improvement in the medium-range order of the diphasic films. For the FT-IR spectra of this kind of films, it notes that there is a blueshift in the Si-H stretching mode and a redshift in the Si-H wagging mode in respect to that of typical amorphous silicon film. We discussed the reasons responsible for these phenomena by means of the phase transition, which lead to the formation of a diatomic hydrogen complex, H-2* and their congeries. |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2013-09-18 |
| 源URL | [http://ir.iphy.ac.cn/handle/311004/42128]  |
| 专题 | 物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文 |
| 推荐引用方式 GB/T 7714 | Zhang, SB,Liao, XB,Xu, YY,et al. Microstructure of the silicon film prepared near the phase transition regime from amorphous to nanocrystalline[J]. QUANTUM CONFINED SEMICONDUCTOR NANOSTRUCTURES,2003,737:679. |
| APA | Zhang, SB.,Liao, XB.,Xu, YY.,Hu, ZH.,Zeng, XB.,...&Kong, G.(2003).Microstructure of the silicon film prepared near the phase transition regime from amorphous to nanocrystalline.QUANTUM CONFINED SEMICONDUCTOR NANOSTRUCTURES,737,679. |
| MLA | Zhang, SB,et al."Microstructure of the silicon film prepared near the phase transition regime from amorphous to nanocrystalline".QUANTUM CONFINED SEMICONDUCTOR NANOSTRUCTURES 737(2003):679. |
入库方式： OAI收割
来源：物理研究所
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