Two-dimensional silicon-based photonic crystal slab with partial air-bridge
文献类型：期刊论文
| 作者 | Tian, J ; Han, SZ ; Cheng, BY ; Feng, S ; Li, ZY ; Ren, C ; Zhang, DZ |
| 刊名 | International Journal of Nanoscience
 |
| 出版日期 | 2006 |
| 卷号 | 5期号:6页码:683 |
| 关键词 | NEAR-INFRARED WAVELENGTHS BAND-GAP |
| 通讯作者 | Tian, J (reprint author), Chinese Acad Sci, Inst Phys, Ctr Condensed Matter Phys, Lab Opt Phys, POB 603, Beijing 100080, Peoples R China. |
| 中文摘要 | We describe a fabrication process of the near-infrared two-dimensional photonic crystal (PC) slab, which is sustained by part of the silica layer underneath the slab and forms a partly air-bridged type. The process involves focused ion beam (FIB) direct write following the selective wet etching of silicon on isolator (SOI) structures. By control the time of dissolving of silica layer in SOI, we successfully fabricated the sample and measured its transmittance spectrum. It is found that the observed spectrum is consistent with the theoretical band structure with FDTD method. For there is partly silica layer remained to support the air-bridge slab, the PC can be fabricated with a large area. If we change the support material under the slab, we might be able to fabricate PC laser with this kind of structure. |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2013-09-23 |
| 源URL | [http://ir.iphy.ac.cn/handle/311004/44634]  |
| 专题 | 物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文 |
| 推荐引用方式 GB/T 7714 | Tian, J,Han, SZ,Cheng, BY,et al. Two-dimensional silicon-based photonic crystal slab with partial air-bridge[J]. International Journal of Nanoscience,2006,5(6):683. |
| APA | Tian, J.,Han, SZ.,Cheng, BY.,Feng, S.,Li, ZY.,...&Zhang, DZ.(2006).Two-dimensional silicon-based photonic crystal slab with partial air-bridge.International Journal of Nanoscience,5(6),683. |
| MLA | Tian, J,et al."Two-dimensional silicon-based photonic crystal slab with partial air-bridge".International Journal of Nanoscience 5.6(2006):683. |
入库方式： OAI收割
来源：物理研究所
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