The digital geometric phase technique applied to the deformation evaluation of MEMS devices
文献类型：期刊论文
| 作者 | Liu, ZW ; Xie, HM ; Gu, CZ ; Meng, YG |
| 刊名 | JOURNAL OF MICROMECHANICS AND MICROENGINEERING
 |
| 出版日期 | 2009 |
| 卷号 | 19期号:1 |
| 关键词 | MOIRE METHOD THIN-FILMS STRAIN DISPLACEMENT MICROSTRUCTURES POLYSILICON MICRO FIELD |
| ISSN号 | 0960-1317 |
| 通讯作者 | Liu, ZW (reprint author), Beijing Inst Technol, Dept Mech, Sch Sci, Beijing 100081, Peoples R China. |
| 中文摘要 | Quantitative evaluation of the structure deformation of microfabricated electromechanical systems is of importance for the design and functional control of microsystems. In this investigation, a novel digital geometric phase technique was developed to meet the deformation evaluation requirement of microelectromechanical systems (MEMS). The technique is performed on the basis of regular artificial lattices, instead of a natural atom lattice. The regular artificial lattices with a pitch ranging from micrometer to nanometer will be directly fabricated on the measured surface of MEMS devices by using a focused ion beam (FIB). Phase information can be obtained from the Bragg filtered images after fast Fourier transform (FFT) and inverse fast Fourier transform (IFFT) of the scanning electronic microscope (SEM) images. Then the in-plane displacement field and the local strain field related to the phase information will be evaluated. The obtained results show that the technique can be well applied to deformation measurement with nanometer sensitivity and stiction force estimation of a MEMS device. |
| 收录类别 | SCI |
| 资助信息 | National Basic Research Program of China [2004CB619304, 2007CB936803]; National Natural Science Foundation of China [10602010, 10625209, 10732080, 10472050]; BeijingNatural Sciences Foundation [3072007]; NewCentury Excellent Talents (NCET) in University; Chinese Ministry of Education [NCET-05-0059]; Excellent Young Scholars Research Fund of Beijing Institute of Technology |
| 语种 | 英语 |
| 公开日期 | 2013-09-23 |
| 源URL | [http://ir.iphy.ac.cn/handle/311004/44994]  |
| 专题 | 物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文 |
| 推荐引用方式 GB/T 7714 | Liu, ZW,Xie, HM,Gu, CZ,et al. The digital geometric phase technique applied to the deformation evaluation of MEMS devices[J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING,2009,19(1). |
| APA | Liu, ZW,Xie, HM,Gu, CZ,&Meng, YG.(2009).The digital geometric phase technique applied to the deformation evaluation of MEMS devices.JOURNAL OF MICROMECHANICS AND MICROENGINEERING,19(1). |
| MLA | Liu, ZW,et al."The digital geometric phase technique applied to the deformation evaluation of MEMS devices".JOURNAL OF MICROMECHANICS AND MICROENGINEERING 19.1(2009). |
入库方式： OAI收割
来源：物理研究所
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