The fabrication and characteristics of (Ba0.5Sr0.5)TiO3 thin films prepared by pulsed laser deposition
文献类型：期刊论文
| 作者 | Yang, GA ; Gu, HS ; Zhu, J ; Wang, YQ |
| 刊名 | JOURNAL OF CRYSTAL GROWTH
 |
| 出版日期 | 2002 |
| 卷号 | 242期号:1-2页码:172 |
| 关键词 | ACCESS MEMORY APPLICATIONS ELECTRICAL-PROPERTIES DIELECTRIC-PROPERTIES CAPACITORS (BA |
| ISSN号 | 0022-0248 |
| 通讯作者 | Yang, GA (reprint author), Chinese Acad Sci, Inst Phys, Lab Opt Phys, POB 603, Beijing 100080, Peoples R China. |
| 中文摘要 | The fabrication and characteristics of (Ba0.5Sr0.5)Ti-0.3 (BST) thin films prepared by sputtering (Ba0.5Sr0.5)TiO3 targets were investigated. The laser-deposited BST films were grown on Si (100) substrates at 700degreesC under an oxygen pressure of 0.1 Pa. The capacitance-voltage behavior of metal-insulator metal structures and their leakage current characteristics were studied. The results showed that the dielectric constant of 40 nm thick BST films was 150, and the dissipation factor was 0.035 at 1 MHz. The leakage current density was 2 x 10(-9) A/cm(2) at 2V. The high dielectric constant, low dielectric loss, and low leakage current show the potential of (Ba0.5Sr0.5)TiO3 thin films for integrated capacitors and high-density dynamic random access memories. (C) 2002 Elsevier Science B.V. All rights reserved. |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2013-09-23 |
| 源URL | [http://ir.iphy.ac.cn/handle/311004/45146]  |
| 专题 | 物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文 |
| 推荐引用方式 GB/T 7714 | Yang, GA,Gu, HS,Zhu, J,et al. The fabrication and characteristics of (Ba0.5Sr0.5)TiO3 thin films prepared by pulsed laser deposition[J]. JOURNAL OF CRYSTAL GROWTH,2002,242(1-2):172. |
| APA | Yang, GA,Gu, HS,Zhu, J,&Wang, YQ.(2002).The fabrication and characteristics of (Ba0.5Sr0.5)TiO3 thin films prepared by pulsed laser deposition.JOURNAL OF CRYSTAL GROWTH,242(1-2),172. |
| MLA | Yang, GA,et al."The fabrication and characteristics of (Ba0.5Sr0.5)TiO3 thin films prepared by pulsed laser deposition".JOURNAL OF CRYSTAL GROWTH 242.1-2(2002):172. |
入库方式： OAI收割
来源：物理研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。