The growth and characterization of diamond cone arrays formed by plasma etching
文献类型：期刊论文
| 作者 | Wang, Q ; Li, JJ ; Jin, AZ ; Wang, ZL ; Xu, P ; Gu, CZ |
| 刊名 | DIAMOND AND RELATED MATERIALS
 |
| 出版日期 | 2006 |
| 卷号 | 15期号:4-8页码:866 |
| 关键词 | ELECTRON-EMISSION FIELD-EMISSION ION MECHANISM CATHODES FILMS |
| ISSN号 | 0925-9635 |
| 通讯作者 | Gu, CZ (reprint author), Chinese Acad Sci, Inst Phys, Beijing Natl Lab Condensed Matter Phys, Beijing 100080, Peoples R China. |
| 中文摘要 | Diamond cone arrays with high aspect ratio are formed by plasma etching on diamond film grown by hot-filament chemical vapor deposition (HFCVD) method. The cone angle and orientation of etched cones with tip diameter of about 10-20 nm are uniform, and the cone density of cone arrays formed on diamond film can be controlled by changing the etching time during plasma etching. Energy dispersion X-ray analysis (EDX) and Raman spectroscopy show that the cone arrays are composed of carbons in the chemical states of diamond, nanodiamond and amorphous carbons. High-resolution transmission electron microscopy (HRTEM) analysis indicates that diamond cone has an amorphous outer layer and an inner core with certain crystallization. It can be concluded that the outer amorphous layer is formed by the bombardment of carbon containing ions on the diamond surface, and the nanodiamond is formed by the dimensional reduction of original diamond crystalline into nanometer scale. Selected area electrons diffraction (SAED) pattern analysis is used to study the structures of diamond cones. The diamond cone formation is interpreted using the selective etching mechanism of grooves on a rough surface of diamond film. (c) 2006 Elsevier B.V. All rights reserved. |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2013-09-23 |
| 源URL | [http://ir.iphy.ac.cn/handle/311004/45182]  |
| 专题 | 物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文 |
| 推荐引用方式 GB/T 7714 | Wang, Q,Li, JJ,Jin, AZ,et al. The growth and characterization of diamond cone arrays formed by plasma etching[J]. DIAMOND AND RELATED MATERIALS,2006,15(4-8):866. |
| APA | Wang, Q,Li, JJ,Jin, AZ,Wang, ZL,Xu, P,&Gu, CZ.(2006).The growth and characterization of diamond cone arrays formed by plasma etching.DIAMOND AND RELATED MATERIALS,15(4-8),866. |
| MLA | Wang, Q,et al."The growth and characterization of diamond cone arrays formed by plasma etching".DIAMOND AND RELATED MATERIALS 15.4-8(2006):866. |
入库方式： OAI收割
来源：物理研究所
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