Thermally induced surface instability in ion-implanted MgxZn1-xO films
文献类型：期刊论文
| 作者 | Azarov, AY ; Hallen, A ; Du, XL ; Liu, ZL ; Svensson, BG ; Kuznetsov, AY |
| 刊名 | PHYSICAL REVIEW B
 |
| 出版日期 | 2011 |
| 卷号 | 84期号:1 |
| 关键词 | PHASE-EQUILIBRIA ALLOY-FILMS ZNO STABILITY BLIND TM |
| ISSN号 | 1098-0121 |
| 通讯作者 | Azarov, AY (reprint author), Univ Oslo, Dept Phys, POB 1048, NO-0316 Oslo, Norway. |
| 中文摘要 | Thermal stability of originally single crystalline wurtzite MgxZn1-xO (x <= 0.3) films implanted at room temperature with Er-166 ions is studied by a combination of Rutherford backscattering spectrometry, time-of-flight elastic recoil detection analysis, x-ray diffraction analysis, and atomic force microscopy. The MgZnO films exhibit a complex behavior during postimplantation annealing associated with compositional changes and surface erosion in addition to Er accumulation at the surface. The importance of these processes depends on the Mg content, annealing temperature, and amount of implantation damage. Specifically, increases in the Mg content as well as the implantation damage enhance the compositional changes in the near-surface region and give rise to altered stoichiometry and Mg-enriched phase separation. In its turn, the rate of surface erosion in MgZnO under the thermal treatment depends on temperature, MgZnO composition, and the amount of implantation damage nontrivially, which is attributed to the compositional changes in the near-surface region assisted by the implantation damage. |
| 收录类别 | SCI |
| 资助信息 | Research Council of Norway; NordForsk; NSFC [61076007, 50532090]; MOSTC [2011CB302002, 2007CB936203] |
| 语种 | 英语 |
| 公开日期 | 2013-09-23 |
| 源URL | [http://ir.iphy.ac.cn/handle/311004/45762]  |
| 专题 | 物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文 |
| 推荐引用方式 GB/T 7714 | Azarov, AY,Hallen, A,Du, XL,et al. Thermally induced surface instability in ion-implanted MgxZn1-xO films[J]. PHYSICAL REVIEW B,2011,84(1). |
| APA | Azarov, AY,Hallen, A,Du, XL,Liu, ZL,Svensson, BG,&Kuznetsov, AY.(2011).Thermally induced surface instability in ion-implanted MgxZn1-xO films.PHYSICAL REVIEW B,84(1). |
| MLA | Azarov, AY,et al."Thermally induced surface instability in ion-implanted MgxZn1-xO films".PHYSICAL REVIEW B 84.1(2011). |
入库方式： OAI收割
来源：物理研究所
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