Three-dimensional micro- and nanometre composite aluminium patterns
文献类型：期刊论文
| 作者 | Zhao, XW ; Jiang, P ; Gao, Y ; Wang, JX ; Song, L ; Liu, DF ; Liu, LF ; Dou, XY ; Luo, SD ; Zhang, ZX ; Xiang, YJ ; Zhou, WY ; Wang, G |
| 刊名 | CHINESE PHYSICS
 |
| 出版日期 | 2005 |
| 卷号 | 14期号:7页码:1471 |
| 关键词 | HIGH-ASPECT-RATIO ANODIC ALUMINA NANOPORE ARRAYS OXIDE SILICON TEMPLATE MICROSTRUCTURES NANOSTRUCTURES REPLICATION FABRICATION |
| ISSN号 | 1009-1963 |
| 通讯作者 | Wang, G (reprint author), Chinese Acad Sci, Inst Phys, Ctr Condensed Matter Phys, Beijing 100080, Peoples R China. |
| 中文摘要 | Three-dimensional micro- and nanometre composite aluminium patterns are constructed on Al substrate by using photolithography, reactive ion etching and anodization. A layer of patterned SiO2 Mask is introduced as resist on the surface of Al foil, and during anodization the tilted nanopores and remaining Al microstructure are formed underneath the SiO2 mask. The existence of SiO2 mask leads to the deflection of electric field and effect on the transportation of ions, which results in the formation of laterally tilted nanopores, while the nanopores go down directly when being far from the boundaries of SiO2. The vertical and lateral anodization processes proceeding simultaneously construct the Al microstructure under the patterned SiO2 mask. |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2013-09-23 |
| 源URL | [http://ir.iphy.ac.cn/handle/311004/45870]  |
| 专题 | 物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文 |
| 推荐引用方式 GB/T 7714 | Zhao, XW,Jiang, P,Gao, Y,et al. Three-dimensional micro- and nanometre composite aluminium patterns[J]. CHINESE PHYSICS,2005,14(7):1471. |
| APA | Zhao, XW.,Jiang, P.,Gao, Y.,Wang, JX.,Song, L.,...&Wang, G.(2005).Three-dimensional micro- and nanometre composite aluminium patterns.CHINESE PHYSICS,14(7),1471. |
| MLA | Zhao, XW,et al."Three-dimensional micro- and nanometre composite aluminium patterns".CHINESE PHYSICS 14.7(2005):1471. |
入库方式： OAI收割
来源：物理研究所
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