Transport Comparison of Multiwall Carbon Nanotubes by Contacting Outer Shell and All Shells
文献类型：期刊论文
| 作者 | Luo, QA ; Cui, AJ ; Zhang, YG ; Lu, C ; Jin, AZ ; Yang, HF ; Gu, CZ |
| 刊名 | JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
 |
| 出版日期 | 2010 |
| 卷号 | 10期号:11页码:7477 |
| 关键词 | TUBULES |
| ISSN号 | 1533-4880 |
| 通讯作者 | Luo, QA (reprint author), Chinese Acad Sci, Inst Phys, Beijing Natl Lab Condensed Matter Phys, Beijing 100190, Peoples R China. |
| 中文摘要 | Carbon nanotubes, particularly multiwall carbon nanotubes (MWCNTs) can serve as interconnects in nanoelectronic devices and integrated circuits because of their extremely large current-carrying capacity. Many experimental results about the transport properties of individual MWCNTs by contacting outer shell or all shells have been reported. In this work, a compatible method with integrated circuit manufacturing process was presented to compare the transport property of an individual multiwall carbon nanotube (MWCNT) by contacting outer shell only and all shells successively. First of the Ti/Au electrodes contacting outer shell only were fabricated onto the nanotube through the sequence of electron beam lithography (EBL) patterning, metal deposition and lift-off process. After the characterization of its transport property, focused ion beam (FIB) was used to drill holes through the same nanotube at the as-deposited electrodes. Then new contact to the holes and electrodes were made by ion-induced deposition of tungsten from W(CO)(6) precursor gas. The transport results indicated that the new contact to all shells can clear up the intershell resistance and the electrical conductance of the tube can be improved about 8 times compared to that of by contacting outer shell only. |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2013-09-23 |
| 源URL | [http://ir.iphy.ac.cn/handle/311004/46106]  |
| 专题 | 物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文 |
| 推荐引用方式 GB/T 7714 | Luo, QA,Cui, AJ,Zhang, YG,et al. Transport Comparison of Multiwall Carbon Nanotubes by Contacting Outer Shell and All Shells[J]. JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY,2010,10(11):7477. |
| APA | Luo, QA.,Cui, AJ.,Zhang, YG.,Lu, C.,Jin, AZ.,...&Gu, CZ.(2010).Transport Comparison of Multiwall Carbon Nanotubes by Contacting Outer Shell and All Shells.JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY,10(11),7477. |
| MLA | Luo, QA,et al."Transport Comparison of Multiwall Carbon Nanotubes by Contacting Outer Shell and All Shells".JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY 10.11(2010):7477. |
入库方式： OAI收割
来源：物理研究所
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