X-RAY-ANALYSIS OF STRAIN RELAXATION IN STRAINED-LAYER SUPERLATTICES
文献类型:期刊论文
作者 | LI, JH ; MAI, ZH ; CUI, SF |
刊名 | JOURNAL OF APPLIED PHYSICS
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出版日期 | 1994 |
卷号 | 76期号:2页码:810 |
关键词 | MISFIT STRAIN HETEROSTRUCTURES DIFFRACTION |
ISSN号 | 0021-8979 |
通讯作者 | LI, JH (reprint author), CHINESE ACAD SCI,INST PHYS,POB 603,BEIJING 100080,PEOPLES R CHINA. |
中文摘要 | Theoretical simulations of x-ray double-crystal-diffraction rocking curves for strain-relaxed superlattices have been successfully carried out based on x-ray dynamical diffraction theory. The strain relaxation, the misorientation between the superlattice layers and the substrate, and the effect of peak broadening due to the formation of misfit dislocations have been taken into account. The influence of possible strain relaxation mechanisms and relaxation ratios on the rocking curves have been investigated. It was found that both the mechanism and degree of the strain relaxation of the superlattice can be determined by fitting the angular positions and the relative intensities of the experimental superlattice satellites. By using this method, an InxGa1-xAs/GaAs superlattice sample and a GexSi1-x/Si superlattice sample were analyzed. The different strain-relaxation mechanisms were found in these two samples. |
收录类别 | SCI |
语种 | 英语 |
公开日期 | 2013-09-23 |
源URL | [http://ir.iphy.ac.cn/handle/311004/46719] ![]() |
专题 | 物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文 |
推荐引用方式 GB/T 7714 | LI, JH,MAI, ZH,CUI, SF. X-RAY-ANALYSIS OF STRAIN RELAXATION IN STRAINED-LAYER SUPERLATTICES[J]. JOURNAL OF APPLIED PHYSICS,1994,76(2):810. |
APA | LI, JH,MAI, ZH,&CUI, SF.(1994).X-RAY-ANALYSIS OF STRAIN RELAXATION IN STRAINED-LAYER SUPERLATTICES.JOURNAL OF APPLIED PHYSICS,76(2),810. |
MLA | LI, JH,et al."X-RAY-ANALYSIS OF STRAIN RELAXATION IN STRAINED-LAYER SUPERLATTICES".JOURNAL OF APPLIED PHYSICS 76.2(1994):810. |
入库方式: OAI收割
来源:物理研究所
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