中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
X-RAY-ANALYSIS OF STRAIN RELAXATION IN STRAINED-LAYER SUPERLATTICES

文献类型:期刊论文

作者LI, JH ; MAI, ZH ; CUI, SF
刊名JOURNAL OF APPLIED PHYSICS
出版日期1994
卷号76期号:2页码:810
关键词MISFIT STRAIN HETEROSTRUCTURES DIFFRACTION
ISSN号0021-8979
通讯作者LI, JH (reprint author), CHINESE ACAD SCI,INST PHYS,POB 603,BEIJING 100080,PEOPLES R CHINA.
中文摘要Theoretical simulations of x-ray double-crystal-diffraction rocking curves for strain-relaxed superlattices have been successfully carried out based on x-ray dynamical diffraction theory. The strain relaxation, the misorientation between the superlattice layers and the substrate, and the effect of peak broadening due to the formation of misfit dislocations have been taken into account. The influence of possible strain relaxation mechanisms and relaxation ratios on the rocking curves have been investigated. It was found that both the mechanism and degree of the strain relaxation of the superlattice can be determined by fitting the angular positions and the relative intensities of the experimental superlattice satellites. By using this method, an InxGa1-xAs/GaAs superlattice sample and a GexSi1-x/Si superlattice sample were analyzed. The different strain-relaxation mechanisms were found in these two samples.
收录类别SCI
语种英语
公开日期2013-09-23
源URL[http://ir.iphy.ac.cn/handle/311004/46719]  
专题物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文
推荐引用方式
GB/T 7714
LI, JH,MAI, ZH,CUI, SF. X-RAY-ANALYSIS OF STRAIN RELAXATION IN STRAINED-LAYER SUPERLATTICES[J]. JOURNAL OF APPLIED PHYSICS,1994,76(2):810.
APA LI, JH,MAI, ZH,&CUI, SF.(1994).X-RAY-ANALYSIS OF STRAIN RELAXATION IN STRAINED-LAYER SUPERLATTICES.JOURNAL OF APPLIED PHYSICS,76(2),810.
MLA LI, JH,et al."X-RAY-ANALYSIS OF STRAIN RELAXATION IN STRAINED-LAYER SUPERLATTICES".JOURNAL OF APPLIED PHYSICS 76.2(1994):810.

入库方式: OAI收割

来源:物理研究所

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